A MEMS-based gravity gradiometer for future planetary missions

Jakob Flokstra, Jan Flokstra, R. Cuperus, R. Cupurus, Remco J. Wiegerink, M.C. van Essen

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Abstract

The gradient in the gravity acceleration is of great interest for planetologists when it can be measured with at least 1 E/√Hz. For this purpose several gravity gradiometer designs are considered. A MEMS-based gradiometer made from a single wafer is considered in this article. Using long springs and small attached masses it is possible to reach a sufficiently low Brownian noise level. The proposed readout for this device will be capacitive plates placed in a comb drive configuration. Trapped charges on these plates can cause noticeable errors when there are more than 0.004 electrons/μm2. Measurements show that trapped charge mobility goes down with temperature.
Original languageUndefined
Article number10.1016/j.cryogenics.2008.12.019
Pages (from-to)665-668
Number of pages4
JournalCryogenics
Volume49
Issue number11
DOIs
Publication statusPublished - Nov 2009

Keywords

  • IR-69824
  • TST-SENSORS
  • EWI-16926
  • METIS-266471

Cite this

Flokstra, J., Flokstra, J., Cuperus, R., Cupurus, R., Wiegerink, R. J., & van Essen, M. C. (2009). A MEMS-based gravity gradiometer for future planetary missions. Cryogenics, 49(11), 665-668. [10.1016/j.cryogenics.2008.12.019]. https://doi.org/10.1016/j.cryogenics.2008.12.019
Flokstra, Jakob ; Flokstra, Jan ; Cuperus, R. ; Cupurus, R. ; Wiegerink, Remco J. ; van Essen, M.C. / A MEMS-based gravity gradiometer for future planetary missions. In: Cryogenics. 2009 ; Vol. 49, No. 11. pp. 665-668.
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Flokstra, J, Flokstra, J, Cuperus, R, Cupurus, R, Wiegerink, RJ & van Essen, MC 2009, 'A MEMS-based gravity gradiometer for future planetary missions' Cryogenics, vol. 49, no. 11, 10.1016/j.cryogenics.2008.12.019, pp. 665-668. https://doi.org/10.1016/j.cryogenics.2008.12.019

A MEMS-based gravity gradiometer for future planetary missions. / Flokstra, Jakob; Flokstra, Jan; Cuperus, R.; Cupurus, R.; Wiegerink, Remco J.; van Essen, M.C.

In: Cryogenics, Vol. 49, No. 11, 10.1016/j.cryogenics.2008.12.019, 11.2009, p. 665-668.

Research output: Contribution to journalArticleAcademicpeer-review

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AU - van Essen, M.C.

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AB - The gradient in the gravity acceleration is of great interest for planetologists when it can be measured with at least 1 E/√Hz. For this purpose several gravity gradiometer designs are considered. A MEMS-based gradiometer made from a single wafer is considered in this article. Using long springs and small attached masses it is possible to reach a sufficiently low Brownian noise level. The proposed readout for this device will be capacitive plates placed in a comb drive configuration. Trapped charges on these plates can cause noticeable errors when there are more than 0.004 electrons/μm2. Measurements show that trapped charge mobility goes down with temperature.

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KW - TST-SENSORS

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KW - METIS-266471

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