@inproceedings{403675ed5cab42f6b1119b71a0995024,
title = "A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface",
abstract = "This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N 2 ) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.",
keywords = "Coriolis, MEMS, Gyroscopic, Mass flow, Sensor interface, 22/3 OA procedure",
author = "{de Oliveira}, A.C. and T.V.P. Schut and J. Groenesteijn and Q. Fan and R.J. Wiegerink and Makinwa, {Kofi A.A.}",
year = "2020",
month = jan,
day = "13",
doi = "10.1109/SENSORS43011.2019.8956695",
language = "English",
isbn = "978-1-7281-1635-8",
series = "Proceedings of IEEE Sensors",
publisher = "IEEE",
booktitle = "2019 IEEE Sensors",
address = "United States",
note = "2019 IEEE SENSORS ; Conference date: 27-10-2019 Through 30-10-2019",
}