A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

A.C. de Oliveira*, T.V.P. Schut, J. Groenesteijn, Q. Fan, R.J. Wiegerink, Kofi A.A. Makinwa

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

6 Citations (Scopus)
27 Downloads (Pure)


This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N 2 ) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.
Original languageEnglish
Title of host publication2019 IEEE Sensors
Subtitle of host publicationSENSORS 2019 - Conference Proceedings
Place of PublicationPiscataway, NJ
ISBN (Electronic)978-1-7281-1634-1
ISBN (Print)978-1-7281-1635-8
Publication statusPublished - 13 Jan 2020
Event2019 IEEE SENSORS - Montreal, Canada
Duration: 27 Oct 201930 Oct 2019

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Conference2019 IEEE SENSORS


  • Coriolis
  • MEMS
  • Gyroscopic
  • Mass flow
  • Sensor interface
  • 22/3 OA procedure

Cite this