A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

Johan W. Berenschot; Niels Roelof Tas

A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

Johan W. Berenschot (Inventor), Niels Roelof Tas (Inventor)

Research output: Patent

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Abstract

The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of: 1. providing a mold comprising at least one sharp concave corner 2. conformational depositing at least one structural material in the sharp concave corner 3. isotropically removing structural material 4. depositing at least one other structural material 5. removing earlier deposited structural material 6. forming a nanosubstructure and 7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure

Original language	Undefined
Patent number	EP20080000094
Priority date	6/07/09
Publication status	Submitted - 6 Jan 2008

Keywords

EWI-14699
METIS-263707
IR-67898

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Cite this

@misc{d836543dd2664155a4bd98f1b4efba7f,

title = "A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method",

abstract = "The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of: 1. providing a mold comprising at least one sharp concave corner 2. conformational depositing at least one structural material in the sharp concave corner 3. isotropically removing structural material 4. depositing at least one other structural material 5. removing earlier deposited structural material 6. forming a nanosubstructure and 7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure",

keywords = "EWI-14699, METIS-263707, IR-67898",

author = "Berenschot, {Johan W.} and Tas, {Niels Roelof}",

year = "2008",

month = jan,

day = "6",

language = "Undefined",

type = "Patent",

note = "EP20080000094",

}

TY - PAT

T1 - A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

PY - 2008/1/6

Y1 - 2008/1/6

N2 - The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of: 1. providing a mold comprising at least one sharp concave corner 2. conformational depositing at least one structural material in the sharp concave corner 3. isotropically removing structural material 4. depositing at least one other structural material 5. removing earlier deposited structural material 6. forming a nanosubstructure and 7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure

AB - The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of: 1. providing a mold comprising at least one sharp concave corner 2. conformational depositing at least one structural material in the sharp concave corner 3. isotropically removing structural material 4. depositing at least one other structural material 5. removing earlier deposited structural material 6. forming a nanosubstructure and 7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure

KW - EWI-14699

KW - METIS-263707

KW - IR-67898

M3 - Patent

M1 - EP20080000094

ER -