A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

Johan W. Berenschot (Inventor), Niels Roelof Tas (Inventor)

    Research output: Patent

    59 Downloads (Pure)


    The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of: 1. providing a mold comprising at least one sharp concave corner 2. conformational depositing at least one structural material in the sharp concave corner 3. isotropically removing structural material 4. depositing at least one other structural material 5. removing earlier deposited structural material 6. forming a nanosubstructure and 7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure
    Original languageUndefined
    Patent numberEP20080000094
    Priority date6/07/09
    Publication statusSubmitted - 6 Jan 2008


    • EWI-14699
    • METIS-263707
    • IR-67898

    Cite this