A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method

Johan W. Berenschot (Inventor), Niels Roelof Tas (Inventor)

    Research output: Patent

    11 Downloads (Pure)

    Abstract

    The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of : i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
    Original languageUndefined
    Patent numberWO2009086915 (A1)
    Priority date16/07/09
    Publication statusIn preparation - 16 Jul 2009

    Keywords

    • IR-68157
    • METIS-264035

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