Abstract
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of : i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
Original language | Undefined |
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Patent number | WO2009086915 (A1) |
Priority date | 16/07/09 |
Publication status | In preparation - 16 Jul 2009 |
Keywords
- IR-68157
- METIS-264035