Abstract
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of:i) providing a mold comprising at least one sharp concave corner;ii) conformational depositing at least one structural material in the sharp concave corneriii) isotropically removing structural material;iv) depositing at least one other structural material;v) removing earlier deposited structural material;vi) forming a nanosubstructure; andvii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
| Original language | English |
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| Patent number | EP3549906 |
| IPC | G01Q 70/ 16 A I |
| Priority date | 22/12/08 |
| Publication status | Published - 9 Oct 2019 |