A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having a nano-apertures and horizontal and/or vertical nanowires obtainable by this method

Johan Willem Berenschot (Inventor), Niels Roelof Tas (Inventor)

    Research output: Patent

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    Chemistry

    Material Science

    Biochemistry, Genetics and Molecular Biology