A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

S. Unnikrishnan (Inventor), Henricus V. Jansen (Inventor), Johan W. Berenschot (Inventor), I. Fazal (Inventor), M.C. Louwerse (Inventor), B. Mogulkoc (Inventor), Remco G.P. Sanders (Inventor), Meint J. de Boer (Inventor), Michael Curt Elwenspoek (Inventor)

    Research output: Patent

    51 Downloads (Pure)


    The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
    Original languageUndefined
    Patent numberEP20080007746
    Priority date28/10/09
    Publication statusSubmitted - 22 Apr 2008


    • METIS-265268
    • EWI-17321
    • IR-69826

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