Abstract
| Original language | Undefined |
|---|---|
| Patent number | EP20080007746 |
| Priority date | 28/10/09 |
| Publication status | Submitted - 22 Apr 2008 |
Keywords
- METIS-265268
- EWI-17321
- IR-69826
Cite this
}
A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. / Unnikrishnan, S. (Inventor); Jansen, Henricus V. (Inventor); Berenschot, Johan W. (Inventor); Fazal, I. (Inventor); Louwerse, M.C. (Inventor); Mogulkoc, B. (Inventor); Sanders, Remco G.P. (Inventor); de Boer, Meint J. (Inventor); Elwenspoek, Michael Curt (Inventor).
Patent No.: EP20080007746.Research output: Patent › Professional
TY - PAT
T1 - A method for making a glass supported system, such glass supported system, and the use of a glass support therefor
AU - Unnikrishnan, S.
AU - Jansen, Henricus V.
AU - Berenschot, Johan W.
AU - Fazal, I.
AU - Louwerse, M.C.
AU - Mogulkoc, B.
AU - Sanders, Remco G.P.
AU - de Boer, Meint J.
AU - Elwenspoek, Michael Curt
PY - 2008/4/22
Y1 - 2008/4/22
N2 - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
AB - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
KW - METIS-265268
KW - EWI-17321
KW - IR-69826
M3 - Patent
M1 - EP20080007746
ER -