A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

S. Unnikrishnan; Henricus V. Jansen; Johan W. Berenschot; I. Fazal; M.C. Louwerse; B. Mogulkoc; Remco G.P. Sanders; Meint J. de Boer; Michael Curt Elwenspoek

A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

S. Unnikrishnan (Inventor), Henricus V. Jansen (Inventor), Johan W. Berenschot (Inventor), I. Fazal (Inventor), M.C. Louwerse (Inventor), B. Mogulkoc (Inventor), Remco G.P. Sanders (Inventor), Meint J. de Boer (Inventor), Michael Curt Elwenspoek (Inventor)

Research output: Patent

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Abstract

The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

Original language	Undefined
Patent number	EP20080007746
Priority date	28/10/09
Publication status	Submitted - 22 Apr 2008

Keywords

METIS-265268
EWI-17321
IR-69826

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Cite this

Unnikrishnan, S., Jansen, H. V., Berenschot, J. W., Fazal, I., Louwerse, M. C., Mogulkoc, B., Sanders, R. G. P., de Boer, M. J., & Elwenspoek, M. C. (2008). A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Manuscript submitted for publication. (Patent No. EP20080007746). http://ep.espacenet.com/publicationDetails/biblio?DB=ep.espacenet.com&adjacent=true&locale=en_EP&FT=D&date=20091028&CC=EP&NR=2112130A1&KC=A1

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abstract = "The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.",

keywords = "METIS-265268, EWI-17321, IR-69826",

author = "S. Unnikrishnan and Jansen, {Henricus V.} and Berenschot, {Johan W.} and I. Fazal and M.C. Louwerse and B. Mogulkoc and Sanders, {Remco G.P.} and {de Boer}, {Meint J.} and Elwenspoek, {Michael Curt}",

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Unnikrishnan, S, Jansen, HV, Berenschot, JW, Fazal, I, Louwerse, MC, Mogulkoc, B, Sanders, RGP, de Boer, MJ & Elwenspoek, MC Apr. 22 2008, A method for making a glass supported system, such glass supported system, and the use of a glass support therefor, Patent No. EP20080007746. <http://ep.espacenet.com/publicationDetails/biblio?DB=ep.espacenet.com&adjacent=true&locale=en_EP&FT=D&date=20091028&CC=EP&NR=2112130A1&KC=A1>

TY - PAT

T1 - A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

AU - Unnikrishnan, S.

AU - Jansen, Henricus V.

AU - Berenschot, Johan W.

AU - Fazal, I.

AU - Louwerse, M.C.

AU - Mogulkoc, B.

AU - Sanders, Remco G.P.

AU - de Boer, Meint J.

AU - Elwenspoek, Michael Curt

PY - 2008/4/22

Y1 - 2008/4/22

N2 - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

AB - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

KW - METIS-265268

KW - EWI-17321

KW - IR-69826

M3 - Patent

M1 - EP20080007746

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