Abstract
The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
Original language | Undefined |
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Patent number | EP20080007746 |
Priority date | 28/10/09 |
Publication status | Submitted - 22 Apr 2008 |
Keywords
- METIS-265268
- EWI-17321
- IR-69826