A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

S. Unnikrishnan (Inventor), Henricus V. Jansen (Inventor), Johan W. Berenschot (Inventor), I. Fazal (Inventor), M.C. Louwerse (Inventor), B. Mogulkoc (Inventor), Remco G.P. Sanders (Inventor), Meint J. de Boer (Inventor), Michael Curt Elwenspoek (Inventor)

    Research output: Patent

    35 Downloads (Pure)

    Abstract

    The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
    Original languageUndefined
    Patent numberEP20080007746
    Priority date28/10/09
    Publication statusSubmitted - 22 Apr 2008

    Keywords

    • METIS-265268
    • EWI-17321
    • IR-69826

    Cite this

    Unnikrishnan, S., Jansen, H. V., Berenschot, J. W., Fazal, I., Louwerse, M. C., Mogulkoc, B., ... Elwenspoek, M. C. (2008). A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Manuscript submitted for publication. (Patent No. EP20080007746).
    Unnikrishnan, S. (Inventor) ; Jansen, Henricus V. (Inventor) ; Berenschot, Johan W. (Inventor) ; Fazal, I. (Inventor) ; Louwerse, M.C. (Inventor) ; Mogulkoc, B. (Inventor) ; Sanders, Remco G.P. (Inventor) ; de Boer, Meint J. (Inventor) ; Elwenspoek, Michael Curt (Inventor). / A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent No.: EP20080007746.
    @misc{3008b57b84264cb4adf8cf69463e8d4e,
    title = "A method for making a glass supported system, such glass supported system, and the use of a glass support therefor",
    abstract = "The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.",
    keywords = "METIS-265268, EWI-17321, IR-69826",
    author = "S. Unnikrishnan and Jansen, {Henricus V.} and Berenschot, {Johan W.} and I. Fazal and M.C. Louwerse and B. Mogulkoc and Sanders, {Remco G.P.} and {de Boer}, {Meint J.} and Elwenspoek, {Michael Curt}",
    year = "2008",
    month = "4",
    day = "22",
    language = "Undefined",
    type = "Patent",
    note = "EP20080007746",

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    Unnikrishnan, S, Jansen, HV, Berenschot, JW, Fazal, I, Louwerse, MC, Mogulkoc, B, Sanders, RGP, de Boer, MJ & Elwenspoek, MC 2008, A method for making a glass supported system, such glass supported system, and the use of a glass support therefor, Patent No. EP20080007746.

    A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. / Unnikrishnan, S. (Inventor); Jansen, Henricus V. (Inventor); Berenschot, Johan W. (Inventor); Fazal, I. (Inventor); Louwerse, M.C. (Inventor); Mogulkoc, B. (Inventor); Sanders, Remco G.P. (Inventor); de Boer, Meint J. (Inventor); Elwenspoek, Michael Curt (Inventor).

    Patent No.: EP20080007746.

    Research output: Patent

    TY - PAT

    T1 - A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

    AU - Unnikrishnan, S.

    AU - Jansen, Henricus V.

    AU - Berenschot, Johan W.

    AU - Fazal, I.

    AU - Louwerse, M.C.

    AU - Mogulkoc, B.

    AU - Sanders, Remco G.P.

    AU - de Boer, Meint J.

    AU - Elwenspoek, Michael Curt

    PY - 2008/4/22

    Y1 - 2008/4/22

    N2 - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

    AB - The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

    KW - METIS-265268

    KW - EWI-17321

    KW - IR-69826

    M3 - Patent

    M1 - EP20080007746

    ER -

    Unnikrishnan S, Jansen HV, Berenschot JW, Fazal I, Louwerse MC, Mogulkoc B et al, inventors. A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. EP20080007746. 2008 Apr 22.