A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

S. Unnikrishnan (Inventor), Henricus V. Jansen (Inventor), Johan W. Berenschot (Inventor), I. Fazal (Inventor), M.C. Louwerse (Inventor), B. Mogulkoc (Inventor), Remco G.P. Sanders (Inventor), Meint J. de Boer (Inventor), Michael Curt Elwenspoek (Inventor)

    Research output: Patent

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