A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring

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Abstract

We have designed and fabricated the first single-wafer proportional micro control valve with built-in capacitive dis-placement sensing. The displacement sensor can facilitate high-speed active proportional control of gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arte-rial pressure with a counter pressure. We demonstrate a near-linear relation between valve plate displacement and inverse capacitance. The valve shows monotonously increasing flow with decreasing capacitance and increasing pressure.
Original languageUndefined
Title of host publicationProceedings of MicroTAS 2013
Place of PublicationStoughton
PublisherThe Printing House, Inc.
Pages1469
Number of pages3
ISBN (Print)978-0-9798064-6-9
Publication statusPublished - 27 Oct 2013
Event17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany
Duration: 27 Oct 201331 Oct 2013
Conference number: 17

Publication series

Name
PublisherThe Printing House

Conference

Conference17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013
Abbreviated titleMicroTAS
CountryGermany
CityFreiburg
Period27/10/1331/10/13

Keywords

  • capacitive
  • TST-FLUID HANDLING
  • Proportional Control
  • EWI-24007
  • Microvalve
  • IR-87912
  • METIS-298990
  • Blood Pressure Waveform
  • MEMS

Cite this

Groen, M., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C., & Wiegerink, R. J. (2013). A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. In Proceedings of MicroTAS 2013 (pp. 1469). Stoughton: The Printing House, Inc..