We have designed and fabricated the first single-wafer proportional micro control valve with built-in capacitive dis-placement sensing. The displacement sensor can facilitate high-speed active proportional control of gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arte-rial pressure with a counter pressure. We demonstrate a near-linear relation between valve plate displacement and inverse capacitance. The valve shows monotonously increasing flow with decreasing capacitance and increasing pressure.
|Title of host publication||Proceedings of MicroTAS 2013|
|Place of Publication||Stoughton|
|Publisher||The Printing House, Inc.|
|Number of pages||3|
|Publication status||Published - 27 Oct 2013|
|Event||17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany|
Duration: 27 Oct 2013 → 31 Oct 2013
Conference number: 17
|Publisher||The Printing House|
|Conference||17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013|
|Period||27/10/13 → 31/10/13|
- TST-FLUID HANDLING
- Proportional Control
- Blood Pressure Waveform
Groen, M., Brookhuis, R. A., van Houwelingen, M. J., Brouwer, D. M., Lötters, J. C., & Wiegerink, R. J. (2013). A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. In Proceedings of MicroTAS 2013 (pp. 1469). Stoughton: The Printing House, Inc..