Abstract
We have designed and fabricated the first single-wafer proportional micro control valve with built-in capacitive dis-placement sensing. The displacement sensor can facilitate high-speed active proportional control of gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arte-rial pressure with a counter pressure. We demonstrate a near-linear relation between valve plate displacement and inverse capacitance. The valve shows monotonously increasing flow with decreasing capacitance and increasing pressure.
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of MicroTAS 2013 |
| Place of Publication | Stoughton |
| Publisher | The Printing House, Inc. |
| Pages | 1469 |
| Number of pages | 3 |
| ISBN (Print) | 978-0-9798064-6-9 |
| Publication status | Published - 27 Oct 2013 |
| Event | 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany Duration: 27 Oct 2013 → 31 Oct 2013 Conference number: 17 |
Publication series
| Name | |
|---|---|
| Publisher | The Printing House |
Conference
| Conference | 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 |
|---|---|
| Abbreviated title | MicroTAS |
| Country/Territory | Germany |
| City | Freiburg |
| Period | 27/10/13 → 31/10/13 |
Keywords
- capacitive
- TST-FLUID HANDLING
- Proportional Control
- EWI-24007
- Microvalve
- IR-87912
- METIS-298990
- Blood Pressure Waveform
- MEMS
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