Abstract
Microhollow cathode discharge devices are very suitable for the generation of stable DC glow discharges in high pressure excimer laser gases. Strong XeCl excimer emission at 308 nm is reported. However the active length of these devices is limited to a few hundreds of micrometers resulting in a gain-length product that is too small to obtain laser operation. We present a new configuration of a microdischarge device that allows the extension of the discharge length up to tens of cm's. In this device stable DC glow discharges are generated between the anode and a slit in the cathode. A specific power deposition (volume averaged) of up to 120 kW/cm3 is obtained. The electrical characteristics as well as the XeCl fluorescence from He:Xe:HCl gas mixtures up to 1 bar total pressure are studied for different input powers and slit widths. The optimum small signal gain coefficient is estimated to be in the order of 0.05
| Original language | English |
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| Number of pages | 1 |
| Journal | Bulletin of the American Physical Society |
| Volume | 47 |
| Publication status | Published - 16 Oct 2002 |
| Event | 55th Annual Gaseous Electronics Conference 2002 - Minneapolis, United States Duration: 15 Oct 2002 → 18 Oct 2002 Conference number: 55 |