A microflown based sound presure microphone suitable for harsh environments

Doekle Reinder Yntema, H.E. de Bree

    Research output: Contribution to conferencePaperAcademic

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    Abstract

    There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 degrees centigrade and other type of pressure microphones often operate with a built in amplifier that does not function above 120 degrees centigrade. The functionality of a MEMS based Microflown acoustic particle velocity sensor in air lies in the use of two heated platinum wires that are resistant to high temperatures and chemical attack. The wires are supported by silicon that has no other function than provide support. A pressure microphone is made based upon the Microflown principle by putting it in the opening of an enclosure. In this paper a silicon and platinum based sound probe for harsh environments is created, combining particle velocity and pressure measurements in a harsh environment. Use of this sensor is possible up to 250 degrees centigrade, in humid and under most chemical environments. The probe realization as well as calibration measurements are presented.
    Original languageUndefined
    Number of pages8
    Publication statusPublished - 2005

    Keywords

    • IR-58817

    Cite this

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    abstract = "There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 degrees centigrade and other type of pressure microphones often operate with a built in amplifier that does not function above 120 degrees centigrade. The functionality of a MEMS based Microflown acoustic particle velocity sensor in air lies in the use of two heated platinum wires that are resistant to high temperatures and chemical attack. The wires are supported by silicon that has no other function than provide support. A pressure microphone is made based upon the Microflown principle by putting it in the opening of an enclosure. In this paper a silicon and platinum based sound probe for harsh environments is created, combining particle velocity and pressure measurements in a harsh environment. Use of this sensor is possible up to 250 degrees centigrade, in humid and under most chemical environments. The probe realization as well as calibration measurements are presented.",
    keywords = "IR-58817",
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    A microflown based sound presure microphone suitable for harsh environments. / Yntema, Doekle Reinder; de Bree, H.E.

    2005.

    Research output: Contribution to conferencePaperAcademic

    TY - CONF

    T1 - A microflown based sound presure microphone suitable for harsh environments

    AU - Yntema, Doekle Reinder

    AU - de Bree, H.E.

    PY - 2005

    Y1 - 2005

    N2 - There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 degrees centigrade and other type of pressure microphones often operate with a built in amplifier that does not function above 120 degrees centigrade. The functionality of a MEMS based Microflown acoustic particle velocity sensor in air lies in the use of two heated platinum wires that are resistant to high temperatures and chemical attack. The wires are supported by silicon that has no other function than provide support. A pressure microphone is made based upon the Microflown principle by putting it in the opening of an enclosure. In this paper a silicon and platinum based sound probe for harsh environments is created, combining particle velocity and pressure measurements in a harsh environment. Use of this sensor is possible up to 250 degrees centigrade, in humid and under most chemical environments. The probe realization as well as calibration measurements are presented.

    AB - There are several cases where a sound field reconstruction or prediction is required under harsh conditions such as high temperature, humidity or chemical attack. A regular pressure microphone will not last long under these conditions. Electret based pressure microphones stop working well above 70 degrees centigrade and other type of pressure microphones often operate with a built in amplifier that does not function above 120 degrees centigrade. The functionality of a MEMS based Microflown acoustic particle velocity sensor in air lies in the use of two heated platinum wires that are resistant to high temperatures and chemical attack. The wires are supported by silicon that has no other function than provide support. A pressure microphone is made based upon the Microflown principle by putting it in the opening of an enclosure. In this paper a silicon and platinum based sound probe for harsh environments is created, combining particle velocity and pressure measurements in a harsh environment. Use of this sensor is possible up to 250 degrees centigrade, in humid and under most chemical environments. The probe realization as well as calibration measurements are presented.

    KW - IR-58817

    M3 - Paper

    ER -