A Micromachined Resonant Beam Realized by Silicon Fusion Bonding

A. Prak

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationEnschede
    PublisherUniversiteit Twente
    Publication statusPublished - 11 Feb 1991

    Publication series

    NameTechnisch rapport
    PublisherUniversiteit Twente
    No.070.3980

    Keywords

    • METIS-117929

    Cite this

    Prak, A. (1991). A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. (Technisch rapport; No. 070.3980). Enschede: Universiteit Twente.