A Micromachined Resonant Beam Realized by Silicon Fusion Bonding

A. Prak

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationEnschede
    PublisherUniversiteit Twente
    Publication statusPublished - 11 Feb 1991

    Publication series

    NameTechnisch rapport
    PublisherUniversiteit Twente
    No.070.3980

    Keywords

    • METIS-117929

    Cite this

    Prak, A. (1991). A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. (Technisch rapport; No. 070.3980). Enschede: Universiteit Twente.
    Prak, A. / A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. Enschede : Universiteit Twente, 1991. (Technisch rapport; 070.3980).
    @book{44527a05bb22476c93f0a1d7681f40d4,
    title = "A Micromachined Resonant Beam Realized by Silicon Fusion Bonding",
    keywords = "METIS-117929",
    author = "A. Prak",
    year = "1991",
    month = "2",
    day = "11",
    language = "English",
    series = "Technisch rapport",
    publisher = "Universiteit Twente",
    number = "070.3980",

    }

    Prak, A 1991, A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. Technisch rapport, no. 070.3980, Universiteit Twente, Enschede.

    A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. / Prak, A.

    Enschede : Universiteit Twente, 1991. (Technisch rapport; No. 070.3980).

    Research output: Book/ReportReportProfessional

    TY - BOOK

    T1 - A Micromachined Resonant Beam Realized by Silicon Fusion Bonding

    AU - Prak, A.

    PY - 1991/2/11

    Y1 - 1991/2/11

    KW - METIS-117929

    M3 - Report

    T3 - Technisch rapport

    BT - A Micromachined Resonant Beam Realized by Silicon Fusion Bonding

    PB - Universiteit Twente

    CY - Enschede

    ER -

    Prak A. A Micromachined Resonant Beam Realized by Silicon Fusion Bonding. Enschede: Universiteit Twente, 1991. (Technisch rapport; 070.3980).