A Micromachined Resonant Beam Realized by Silicon Fusion Bonding

Research output: Book/Report › Report › Professional

Keywords

@book{44527a05bb22476c93f0a1d7681f40d4,

title = "A Micromachined Resonant Beam Realized by Silicon Fusion Bonding",

keywords = "METIS-117929",

author = "A. Prak",

year = "1991",

month = feb,

day = "11",

language = "English",

series = "Technisch rapport",

publisher = "University of Twente",

number = "070.3980",

address = "Netherlands",

}