A micromachined surface stress sensor with electronic readout

Edwin Carlen, M.S. Weinberg, A.M. Zapata, J.T. Borenstein

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    Abstract

    A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filtered resulting in a dc output voltage proportional to the change in differential surface stress. The differential surface stress change of the Au111 coated silicon sensors due to chemisorbed alkanethiols is s −0.42 ± 0.0028 N m−1 for 1-dodecanethiol DT and −0.14 ± 0.0028 N m−1 for 1-butanethiol BT. The estimated measurement resolution 1 Hz bandwidth is 0.12 mN m−1 DT: 0.2 pg mm−2 and BT: 0.8 pg mm−2 and as high as 3.82 N m−1 DT: 8 fg mm−2 and BT: 24 fg mm−2 with system optimization. © 2008 American Institute of Physics.
    Original languageUndefined
    Article number10.1063/1.2830938
    Pages (from-to)015106
    JournalReview of scientific instruments
    Volume79
    Issue number302/1
    DOIs
    Publication statusPublished - 11 Jan 2008

    Keywords

    • METIS-251055
    • IR-64853
    • EWI-13009

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