A micromachined surface stress sensor with electronic readout

Edwin Carlen, M.S. Weinberg, A.M. Zapata, J.T. Borenstein

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)
    230 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'A micromachined surface stress sensor with electronic readout'. Together they form a unique fingerprint.