A micromechanical viewing screen: principle and feasibility

F.C.M. van de Pol; M. Elwenspoek; T.S.J. Lammerink; J.H.J. Fluitman

A micromechanical viewing screen: principle and feasibility

F.C.M. van de Pol, M. Elwenspoek, T.S.J. Lammerink, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	5th Sensors & Actuators Symposium
Subtitle of host publication	proceedings S&A Symposium of the University of Twente, Enschede, the Netherlands, November 15-16, 1990
Editors	A. Driessen
Place of Publication	Enschede
Publisher	Universiteit Twente
Pages	249-253
Number of pages	5
ISBN (Print)	9020124668
Publication status	Published - 15 Nov 1990
Event	5th Sensors & Actuators Symposium 1990 - University of Twente, Enschede, Netherlands Duration: 15 Nov 1990 → 16 Nov 1990 Conference number: 5

Conference

Conference	5th Sensors & Actuators Symposium 1990
Country/Territory	Netherlands
City	Enschede
Period	15/11/90 → 16/11/90

Cite this

@inproceedings{64ff2ba2c6034e82936b279bc650dc76,

title = "A micromechanical viewing screen: principle and feasibility",

author = "{van de Pol}, F.C.M. and M. Elwenspoek and T.S.J. Lammerink and J.H.J. Fluitman",

year = "1990",

month = nov,

day = "15",

language = "English",

isbn = "9020124668",

pages = "249--253",

editor = "A. Driessen",

booktitle = "5th Sensors & Actuators Symposium",

publisher = "Universiteit Twente",

note = "5th Sensors & Actuators Symposium 1990<br/> ; Conference date: 15-11-1990 Through 16-11-1990",

}

van de Pol, FCM, Elwenspoek, M, Lammerink, TSJ & Fluitman, JHJ 1990, A micromechanical viewing screen: principle and feasibility. in A Driessen (ed.), 5th Sensors & Actuators Symposium: proceedings S&A Symposium of the University of Twente, Enschede, the Netherlands, November 15-16, 1990 . Universiteit Twente, Enschede, pp. 249-253, 5th Sensors & Actuators Symposium 1990
, Enschede, Netherlands, 15/11/90.

A micromechanical viewing screen : principle and feasibility. / van de Pol, F.C.M.; Elwenspoek, M.; Lammerink, T.S.J. et al.

5th Sensors & Actuators Symposium: proceedings S&A Symposium of the University of Twente, Enschede, the Netherlands, November 15-16, 1990 . ed. / A. Driessen. Enschede : Universiteit Twente, 1990. p. 249-253.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A micromechanical viewing screen

T2 - 5th Sensors & Actuators Symposium 1990<br/>

AU - van de Pol, F.C.M.

AU - Elwenspoek, M.

AU - Lammerink, T.S.J.

AU - Fluitman, J.H.J.

N1 - Conference code: 5

PY - 1990/11/15

Y1 - 1990/11/15

M3 - Conference contribution

SN - 9020124668

SP - 249

EP - 253

BT - 5th Sensors & Actuators Symposium

A2 - Driessen, A.

PB - Universiteit Twente

CY - Enschede

Y2 - 15 November 1990 through 16 November 1990

ER -