A micromechanical viewing screen: principle and feasibility

F.C.M. van de Pol, M. Elwenspoek, T.S.J. Lammerink, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publication5th Sensors & Actuators Symposium
    Subtitle of host publicationproceedings S&A Symposium of the University of Twente, Enschede, the Netherlands, November 15-16, 1990
    EditorsA. Driessen
    Place of PublicationEnschede
    PublisherUniversiteit Twente
    Pages249-253
    Number of pages5
    ISBN (Print)9020124668
    Publication statusPublished - 15 Nov 1990
    Event5th Sensors & Actuators Symposium 1990
    - University of Twente, Enschede, Netherlands
    Duration: 15 Nov 199016 Nov 1990
    Conference number: 5

    Conference

    Conference5th Sensors & Actuators Symposium 1990
    CountryNetherlands
    CityEnschede
    Period15/11/9016/11/90

    Cite this

    van de Pol, F. C. M., Elwenspoek, M., Lammerink, T. S. J., & Fluitman, J. H. J. (1990). A micromechanical viewing screen: principle and feasibility. In A. Driessen (Ed.), 5th Sensors & Actuators Symposium: proceedings S&A Symposium of the University of Twente, Enschede, the Netherlands, November 15-16, 1990 (pp. 249-253). Enschede: Universiteit Twente.