A micromirror for optical projection displays

Robert Anton Brookhuis, Meint J. de Boer, Marcel Dijkstra, A.A. Kuijpers, D. Lierop, Remco J. Wiegerink

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    Abstract

    In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.
    Original languageUndefined
    Title of host publication21st Micromechanics and Micro Systems Europe Workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Pages1-4
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - 26 Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • METIS-276768
    • EWI-19691
    • IR-76084

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