A micromirror for optical projection displays

Robert Anton Brookhuis; Meint J. de Boer; Marcel Dijkstra; A.A. Kuijpers; D. Lierop; Remco J. Wiegerink

A micromirror for optical projection displays

Robert Anton Brookhuis
, Meint J. de Boer
, Marcel Dijkstra
, A.A. Kuijpers
, D. Lierop
, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.

Original language	Undefined
Title of host publication	21st Micromechanics and Micro Systems Europe Workshop (MME 2010)
Place of Publication	Enschede
Publisher	University of Twente
Pages	1-4
Number of pages	4
ISBN (Print)	978-90-81673716
Publication status	Published - 26 Sept 2010
Event	21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21

Publication series

Name
Publisher	University of Twente

Workshop

Workshop	21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated title	MME
Country/Territory	Netherlands
City	Enschede
Period	26/09/10 → 29/09/10

Keywords

METIS-276768
EWI-19691
IR-76084

Access to Document

Cite this

@inproceedings{6f3d2bf5ff54473a829c4c2c9a605212,

title = "A micromirror for optical projection displays",

abstract = "In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.",

keywords = "METIS-276768, EWI-19691, IR-76084",

author = "Brookhuis, \{Robert Anton\} and \{de Boer\}, \{Meint J.\} and Marcel Dijkstra and A.A. Kuijpers and D. Lierop and Wiegerink, \{Remco J.\}",

year = "2010",

month = sep,

day = "26",

language = "Undefined",

isbn = "978-90-81673716",

publisher = "University of Twente",

pages = "1--4",

booktitle = "21st Micromechanics and Micro Systems Europe Workshop (MME 2010)",

address = "Netherlands",

note = "21st Micromechanics and Microsystems Europe Workshop, MME 2010 ; Conference date: 26-09-2010 Through 29-09-2010",

}

TY - GEN

T1 - A micromirror for optical projection displays

AU - Brookhuis, Robert Anton

AU - de Boer, Meint J.

AU - Dijkstra, Marcel

AU - Kuijpers, A.A.

AU - Lierop, D.

AU - Wiegerink, Remco J.

N1 - Conference code: 21

PY - 2010/9/26

Y1 - 2010/9/26

N2 - In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.

AB - In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.

KW - METIS-276768

KW - EWI-19691

KW - IR-76084

M3 - Conference contribution

SN - 978-90-81673716

SP - 1

EP - 4

BT - 21st Micromechanics and Micro Systems Europe Workshop (MME 2010)

PB - University of Twente

CY - Enschede

T2 - 21st Micromechanics and Microsystems Europe Workshop, MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -