A microsensor array for biochemical sensing

Filip Van Steenkiste, Kris Baert, Dirk Debruyker, Vincent Spiering, B.H. van der Schoot, Philippe Arquint, Reinhard Born, Klaus Schumann

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    A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO2 and pCO2 sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications. The integration method allows to integrate other types of sensor chips. This multi-purpose and multi-user approach makes the microsensor array suitable for various biochemical applications.
    Original languageEnglish
    Pages (from-to)409-412
    JournalSensors and actuators. B: Chemical
    Issue number1-3
    Publication statusPublished - 1997

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