TY - JOUR
T1 - A microsensor array for biochemical sensing
AU - Van Steenkiste, Filip
AU - Baert, Kris
AU - Debruyker, Dirk
AU - Spiering, Vincent
AU - van der Schoot, B.H.
AU - Arquint, Philippe
AU - Born, Reinhard
AU - Schumann, Klaus
PY - 1997
Y1 - 1997
N2 - A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO2 and pCO2 sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications. The integration method allows to integrate other types of sensor chips. This multi-purpose and multi-user approach makes the microsensor array suitable for various biochemical applications.
AB - A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO2 and pCO2 sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications. The integration method allows to integrate other types of sensor chips. This multi-purpose and multi-user approach makes the microsensor array suitable for various biochemical applications.
U2 - 10.1016/S0925-4005(97)00234-7
DO - 10.1016/S0925-4005(97)00234-7
M3 - Article
SN - 0925-4005
VL - 44
SP - 409
EP - 412
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
IS - 1-3
ER -