A miniature high-power KrF laser excited with a capacitively coupled discharge

T. Gerber, Hubertus M.J. Bastiaens, P.J.M. Peters

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Abstract

A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
Original languageUndefined
Pages (from-to)191-193
JournalIEEE journal of quantum electronics
Volume21
Issue number3
Publication statusPublished - 1985

Keywords

  • IR-55625

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