A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
|Journal||IEEE journal of quantum electronics|
|Publication status||Published - 1985|