A miniature microclimate thermal flow sensor for horticultural applications

Dennis Alveringh; Daniël G. Bijsterveld; Tomas E. van den Berg; Henk-Willem Veltkamp; Kevin. M. Batenburg; Remco. G. P. Sanders; Joost C. Lötters; Remco J. Wiegerink

doi:10.1109/SENSORS52175.2022.9967348

A miniature microclimate thermal flow sensor for horticultural applications

Dennis Alveringh, Daniël G. Bijsterveld, Tomas E. van den Berg, Henk-Willem Veltkamp, Kevin. M. Batenburg, Remco. G. P. Sanders, Joost C. Lötters, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

Closely packed plant canopies have a negative influence on the uniformity of conditioned air and therefore induce physiological disorders inside plant production systems. Real-time leaf-level flow measurements help to improve the microclimate. This application needs a small and low-cost flow sensor for a flow regime up to 1 m/s . The chip that is presented in this paper consists of five suspended heavily p-doped silicon beams with resistors integrated in the tip. A fluid flow along these tips causes a temperature difference between the resistors by convective heat transfer, enabling calorimetric flow sensing. The 4.4 mm by 3.6 mm sensor is realized in a three-mask versatile fabrication process. The sensor shows a range of 1 m/s to 3 m/s for air with a maximum sensitivity of 1.8 mVs/m and a standard deviation-based accuracy of 3.6 cm/s. The sensor design is easily scalable in theory, hence, a redesign will be made with a slightly lower flow range to fully meet the requirements for the application.

Original language	English
Title of host publication	2022 IEEE Sensors
Publisher	IEEE/EUCA
Number of pages	4
ISBN (Electronic)	9781665484640
ISBN (Print)	978-1-6654-8465-7
DOIs	https://doi.org/10.1109/SENSORS52175.2022.9967348
Publication status	Published - 8 Dec 2022
Event	2022 IEEE Sensors - Dallas, TX, USA Duration: 30 Oct 2022 → 2 Nov 2022

Conference

Conference	2022 IEEE Sensors
Period	30/10/22 → 2/11/22

Keywords

flow sensor
calorimetric
thermal
microfluidics
horticulture
agriculture
MEMS
microclimate
22/4 OA procedure

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10.1109/SENSORS52175.2022.9967348

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A_miniature_microclimate_thermal_flow_sensor_for_horticultural_applications
Final published version, 611 KB
Licence: Taverne
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Cite this

@inproceedings{07eefaa9defe4e7182cac5b3c4cbba75,

title = "A miniature microclimate thermal flow sensor for horticultural applications",

abstract = "Closely packed plant canopies have a negative influence on the uniformity of conditioned air and therefore induce physiological disorders inside plant production systems. Real-time leaf-level flow measurements help to improve the microclimate. This application needs a small and low-cost flow sensor for a flow regime up to 1 m/s . The chip that is presented in this paper consists of five suspended heavily p-doped silicon beams with resistors integrated in the tip. A fluid flow along these tips causes a temperature difference between the resistors by convective heat transfer, enabling calorimetric flow sensing. The 4.4 mm by 3.6 mm sensor is realized in a three-mask versatile fabrication process. The sensor shows a range of 1 m/s to 3 m/s for air with a maximum sensitivity of 1.8 mVs/m and a standard deviation-based accuracy of 3.6 cm/s. The sensor design is easily scalable in theory, hence, a redesign will be made with a slightly lower flow range to fully meet the requirements for the application.",

keywords = "flow sensor, calorimetric, thermal, microfluidics, horticulture, agriculture, MEMS, microclimate, 22/4 OA procedure",

author = "Dennis Alveringh and Bijsterveld, {Dani{\"e}l G.} and Berg, {Tomas E. van den} and Henk-Willem Veltkamp and Batenburg, {Kevin. M.} and Sanders, {Remco. G. P.} and L{\"o}tters, {Joost C.} and Wiegerink, {Remco J.}",

note = "Funding Information: ACKNOWLEDGMENTS The authors gratefully acknowledge the technical support from Erwin Berenschot and the financial support from Sector-plan B{\`e}ta and Techniek and the 4TU project Plantenna. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Sensors ; Conference date: 30-10-2022 Through 02-11-2022",

year = "2022",

month = dec,

day = "8",

doi = "10.1109/SENSORS52175.2022.9967348",

language = "English",

isbn = "978-1-6654-8465-7",

booktitle = "2022 IEEE Sensors",

publisher = "IEEE/EUCA",

}

TY - GEN

T1 - A miniature microclimate thermal flow sensor for horticultural applications

AU - Alveringh, Dennis

AU - Bijsterveld, Daniël G.

AU - Berg, Tomas E. van den

AU - Veltkamp, Henk-Willem

AU - Batenburg, Kevin. M.

AU - Sanders, Remco. G. P.

AU - Lötters, Joost C.

AU - Wiegerink, Remco J.

N1 - Funding Information: ACKNOWLEDGMENTS The authors gratefully acknowledge the technical support from Erwin Berenschot and the financial support from Sector-plan Bèta and Techniek and the 4TU project Plantenna. Publisher Copyright: © 2022 IEEE.

PY - 2022/12/8

Y1 - 2022/12/8

N2 - Closely packed plant canopies have a negative influence on the uniformity of conditioned air and therefore induce physiological disorders inside plant production systems. Real-time leaf-level flow measurements help to improve the microclimate. This application needs a small and low-cost flow sensor for a flow regime up to 1 m/s . The chip that is presented in this paper consists of five suspended heavily p-doped silicon beams with resistors integrated in the tip. A fluid flow along these tips causes a temperature difference between the resistors by convective heat transfer, enabling calorimetric flow sensing. The 4.4 mm by 3.6 mm sensor is realized in a three-mask versatile fabrication process. The sensor shows a range of 1 m/s to 3 m/s for air with a maximum sensitivity of 1.8 mVs/m and a standard deviation-based accuracy of 3.6 cm/s. The sensor design is easily scalable in theory, hence, a redesign will be made with a slightly lower flow range to fully meet the requirements for the application.

AB - Closely packed plant canopies have a negative influence on the uniformity of conditioned air and therefore induce physiological disorders inside plant production systems. Real-time leaf-level flow measurements help to improve the microclimate. This application needs a small and low-cost flow sensor for a flow regime up to 1 m/s . The chip that is presented in this paper consists of five suspended heavily p-doped silicon beams with resistors integrated in the tip. A fluid flow along these tips causes a temperature difference between the resistors by convective heat transfer, enabling calorimetric flow sensing. The 4.4 mm by 3.6 mm sensor is realized in a three-mask versatile fabrication process. The sensor shows a range of 1 m/s to 3 m/s for air with a maximum sensitivity of 1.8 mVs/m and a standard deviation-based accuracy of 3.6 cm/s. The sensor design is easily scalable in theory, hence, a redesign will be made with a slightly lower flow range to fully meet the requirements for the application.

KW - flow sensor

KW - calorimetric

KW - thermal

KW - microfluidics

KW - horticulture

KW - agriculture

KW - MEMS

KW - microclimate

KW - 22/4 OA procedure

U2 - 10.1109/SENSORS52175.2022.9967348

DO - 10.1109/SENSORS52175.2022.9967348

M3 - Conference contribution

SN - 978-1-6654-8465-7

BT - 2022 IEEE Sensors

PB - IEEE/EUCA

T2 - 2022 IEEE Sensors

Y2 - 30 October 2022 through 2 November 2022

ER -

A miniature microclimate thermal flow sensor for horticultural applications

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Keywords

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