A miniaturized chemical analysis using two silicon micro pumps

Bart H. van der Schoot*, Albert van den Berg, Sylvain Jeanneret, Nico F. de Rooij, Alain Grisel

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

13 Citations (Scopus)
4 Downloads (Pure)

Abstract

A hybrid miniature chemical analysis system is realized using two piezoelectrically driven silicon micro-pumps and a separate glass flow through a cell with a potassium-sensitive ISFET. The measurement protocol is such that the sample solution does enter the detector but does not pass the sensitive pump valves, thus improving the practical applicability of the system. During its operation the sensor is continuously calibrated with a very low consumption of calibrating solution. With a measurement rate of 4 samples per minute the consumption of calibrant is only 2 ml/hour.

Original languageEnglish
Title of host publicationTransducers '91
Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages789-791
Number of pages3
ISBN (Print)0-87942-585-7
DOIs
Publication statusPublished - 1 Dec 1991
Externally publishedYes
Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
Duration: 24 Jun 199127 Jun 1991

Conference

Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated titleTRANSDUCERS '91
CountryUnited States
CitySan Francisco
Period24/06/9127/06/91

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