A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

V.M. Blanco Carballo, M.A. Chefdeville, H. van der Graaf, Cora Salm, Antonius A.I. Aarnink, Sander M. Smits, D.M. Altpeter, J. Timmermans, J. Timmermans, J.L. Visschers, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)

    Abstract

    This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.
    Original languageUndefined
    Title of host publicationProceedings of 32nd European Solid State Device Research Conference
    PublisherIEEE Computer Society Press
    Pages129-132
    Number of pages4
    ISBN (Print)1-4244-0301-4
    DOIs
    Publication statusPublished - 7 Jul 2006
    Event32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy
    Duration: 24 Sep 200226 Sep 2002
    Conference number: 32

    Publication series

    Name
    PublisherIEEE Computer Society Press
    Number2
    VolumeIEEE catal

    Conference

    Conference32nd European Solid-State Device Research Conference, ESSDERC 2002
    Abbreviated titleESSDERC
    CountryItaly
    CityFirenze
    Period24/09/0226/09/02

    Keywords

    • SC-RID: Radiation Imaging detectors
    • IR-62882
    • METIS-238027
    • EWI-2812

    Cite this

    Blanco Carballo, V. M., Chefdeville, M. A., van der Graaf, H., Salm, C., Aarnink, A. A. I., Smits, S. M., ... Schmitz, J. (2006). A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. In Proceedings of 32nd European Solid State Device Research Conference (pp. 129-132). IEEE Computer Society Press. https://doi.org/10.1109/ESSDER.2006.307655