A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

V.M. Blanco Carballo; M.A. Chefdeville; H. van der Graaf; C. Salm; A.A.I. Aarnink; S.M. Smits; D.M. Altpeter; J. Timmermans; J.L. Visschers; J. Schmitz

doi:10.1109/ESSDER.2006.307655

A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

V.M. Blanco Carballo, M.A. Chefdeville, H. van der Graaf, C. Salm, A.A.I. Aarnink, S.M. Smits, D.M. Altpeter, J. Timmermans, J.L. Visschers, J. Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

3 Downloads (Pure)

Abstract

This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.

Original language	English
Title of host publication	Proceedings of 32nd European Solid State Device Research Conference
Publisher	IEEE
Pages	129-132
Number of pages	4
ISBN (Print)	1-4244-0301-4
DOIs	https://doi.org/10.1109/ESSDER.2006.307655
Publication status	Published - 7 Jul 2006
Event	32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy Duration: 24 Sept 2002 → 26 Sept 2002 Conference number: 32

Publication series

Name	European Solid-State Device Research Conference
Publisher	IEEE Computer Society Press
Volume	2006
ISSN (Print)	1930-8876
ISSN (Electronic)	2378-6558

Conference

Conference	32nd European Solid-State Device Research Conference, ESSDERC 2002
Abbreviated title	ESSDERC
Country/Territory	Italy
City	Firenze
Period	24/09/02 → 26/09/02

Keywords

SC-RID: Radiation Imaging detectors

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10.1109/ESSDER.2006.307655

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Blanco Carballo, V. M., Chefdeville, M. A., van der Graaf, H., Salm, C., Aarnink, A. A. I., Smits, S. M., Altpeter, D. M., Timmermans, J., Visschers, J. L., & Schmitz, J. (2006). A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. In Proceedings of 32nd European Solid State Device Research Conference (pp. 129-132). (European Solid-State Device Research Conference; Vol. 2006). IEEE. https://doi.org/10.1109/ESSDER.2006.307655

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title = "A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing",

abstract = "This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.",

keywords = "SC-RID: Radiation Imaging detectors",

author = "{Blanco Carballo}, V.M. and M.A. Chefdeville and {van der Graaf}, H. and C. Salm and A.A.I. Aarnink and S.M. Smits and D.M. Altpeter and J. Timmermans and J.L. Visschers and J. Schmitz",

year = "2006",

month = jul,

day = "7",

doi = "10.1109/ESSDER.2006.307655",

language = "English",

isbn = "1-4244-0301-4",

series = "European Solid-State Device Research Conference",

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pages = "129--132",

booktitle = "Proceedings of 32nd European Solid State Device Research Conference",

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note = "32nd European Solid-State Device Research Conference, ESSDERC 2002, ESSDERC ; Conference date: 24-09-2002 Through 26-09-2002",

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Blanco Carballo, VM, Chefdeville, MA, van der Graaf, H, Salm, C , Aarnink, AAI , Smits, SM, Altpeter, DM, Timmermans, J, Visschers, JL & Schmitz, J 2006, A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. in Proceedings of 32nd European Solid State Device Research Conference. European Solid-State Device Research Conference, vol. 2006, IEEE, pp. 129-132, 32nd European Solid-State Device Research Conference, ESSDERC 2002, Firenze, Italy, 24/09/02. https://doi.org/10.1109/ESSDER.2006.307655

A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. / Blanco Carballo, V.M.; Chefdeville, M.A.; van der Graaf, H. et al.
Proceedings of 32nd European Solid State Device Research Conference. IEEE, 2006. p. 129-132 (European Solid-State Device Research Conference; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

AU - Blanco Carballo, V.M.

AU - Chefdeville, M.A.

AU - van der Graaf, H.

AU - Salm, C.

AU - Aarnink, A.A.I.

AU - Smits, S.M.

AU - Altpeter, D.M.

AU - Timmermans, J.

AU - Visschers, J.L.

AU - Schmitz, J.

N1 - Conference code: 32

PY - 2006/7/7

Y1 - 2006/7/7

N2 - This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.

AB - This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.

KW - SC-RID: Radiation Imaging detectors

U2 - 10.1109/ESSDER.2006.307655

DO - 10.1109/ESSDER.2006.307655

M3 - Conference contribution

SN - 1-4244-0301-4

T3 - European Solid-State Device Research Conference

SP - 129

EP - 132

BT - Proceedings of 32nd European Solid State Device Research Conference

PB - IEEE

T2 - 32nd European Solid-State Device Research Conference, ESSDERC 2002

Y2 - 24 September 2002 through 26 September 2002

ER -

A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

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