A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

V.M. Blanco Carballo, M.A. Chefdeville, H. van der Graaf, C. Salm, A.A.I. Aarnink, S.M. Smits, D.M. Altpeter, J. Timmermans, J.L. Visschers, J. Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.
    Original languageEnglish
    Title of host publicationProceedings of 32nd European Solid State Device Research Conference
    PublisherIEEE Computer Society Press
    Pages129-132
    Number of pages4
    ISBN (Print)1-4244-0301-4
    DOIs
    Publication statusPublished - 7 Jul 2006
    Event32nd European Solid-State Device Research Conference, ESSDERC 2002 - Firenze, Italy
    Duration: 24 Sep 200226 Sep 2002
    Conference number: 32

    Publication series

    NameEuropean Solid-State Device Research Conference
    PublisherIEEE Computer Society Press
    Volume2006
    ISSN (Print)1930-8876
    ISSN (Electronic)2378-6558

    Conference

    Conference32nd European Solid-State Device Research Conference, ESSDERC 2002
    Abbreviated titleESSDERC
    Country/TerritoryItaly
    CityFirenze
    Period24/09/0226/09/02

    Keywords

    • SC-RID: Radiation Imaging detectors

    Fingerprint

    Dive into the research topics of 'A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing'. Together they form a unique fingerprint.

    Cite this