A monolithically integrated silicon microphone with piezoelectric polymer layers

R. Schellin, M. Pedersen, Wouter Olthuis, Piet Bergveld, G. Hess

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationSixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95)
    Place of PublicationCopenhagen, Denmark
    Publication statusPublished - 3 Sep 1995


    • METIS-113773

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