A monolithically integrated silicon microphone with piezoelectric polymer layers

R. Schellin, M. Pedersen, Wouter Olthuis, Piet Bergveld, G. Hess

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationSixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95)
    Place of PublicationCopenhagen, Denmark
    Pages217-220
    Publication statusPublished - 3 Sep 1995

    Keywords

    • METIS-113773

    Cite this

    Schellin, R., Pedersen, M., Olthuis, W., Bergveld, P., & Hess, G. (1995). A monolithically integrated silicon microphone with piezoelectric polymer layers. In Sixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95) (pp. 217-220). Copenhagen, Denmark.