A monolithically integrated silicon microphone with piezoelectric polymer layers

R. Schellin, Michael Pedersen, Wouter Olthuis, Piet Bergveld, G. Hess

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Sixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95)
Place of Publication	Copenhagen, Denmark
Pages	217-220
Publication status	Published - 3 Sept 1995

Cite this

@inproceedings{a7a0443aef784f2fbce7d5aa5de87df7,

title = "A monolithically integrated silicon microphone with piezoelectric polymer layers",

author = "R. Schellin and Michael Pedersen and Wouter Olthuis and Piet Bergveld and G. Hess",

year = "1995",

month = sep,

day = "3",

language = "English",

isbn = "87-89935-00-4",

pages = "217--220",

booktitle = "Sixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95)",

}

A monolithically integrated silicon microphone with piezoelectric polymer layers. / Schellin, R.; Pedersen, Michael; Olthuis, Wouter et al.
Sixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95). Copenhagen, Denmark, 1995. p. 217-220.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A monolithically integrated silicon microphone with piezoelectric polymer layers

AU - Schellin, R.

AU - Pedersen, Michael

AU - Olthuis, Wouter

AU - Bergveld, Piet

AU - Hess, G.

PY - 1995/9/3

Y1 - 1995/9/3

M3 - Conference contribution

SN - 87-89935-00-4

SP - 217

EP - 220

BT - Sixth Workshop on Micromachining Micromechanics and Mricosystems (MME '95)

CY - Copenhagen, Denmark

ER -