A Musical instrument in MEMS

Johannes Bernardus Charles Engelen, Hans L. de Boer, H. de Boer, J.G. Beekman, A.J. Been, Gerrit Adriaan Folkertsma, G.A. Folkertsma, L. Fortgens, D. de Graaf, S. Vocke, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Pages193-196
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente, Transducers Science and Technology (TST)

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • METIS-275712
    • Comb drive
    • IR-74825
    • TST-SMI: Formerly in EWI-SMI
    • EWI-18876
    • capacitive sensor
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Musical instrument

    Cite this

    Engelen, J. B. C., de Boer, H. L., de Boer, H., Beekman, J. G., Been, A. J., Folkertsma, G. A., ... Elwenspoek, M. C. (2010). A Musical instrument in MEMS. In Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010) (pp. 193-196). Enschede: University of Twente - Transducers Science and Technology (TST).
    Engelen, Johannes Bernardus Charles ; de Boer, Hans L. ; de Boer, H. ; Beekman, J.G. ; Been, A.J. ; Folkertsma, Gerrit Adriaan ; Folkertsma, G.A. ; Fortgens, L. ; de Graaf, D. ; Vocke, S. ; Woldering, L.A. ; Abelmann, Leon ; Elwenspoek, Michael Curt. / A Musical instrument in MEMS. Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede : University of Twente - Transducers Science and Technology (TST), 2010. pp. 193-196
    @inproceedings{ca64ef17d3c74b428b5724872d3b7041,
    title = "A Musical instrument in MEMS",
    abstract = "In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.",
    keywords = "METIS-275712, Comb drive, IR-74825, TST-SMI: Formerly in EWI-SMI, EWI-18876, capacitive sensor, TST-uSPAM: micro Scanning Probe Array Memory, Musical instrument",
    author = "Engelen, {Johannes Bernardus Charles} and {de Boer}, {Hans L.} and {de Boer}, H. and J.G. Beekman and A.J. Been and Folkertsma, {Gerrit Adriaan} and G.A. Folkertsma and L. Fortgens and {de Graaf}, D. and S. Vocke and L.A. Woldering and Leon Abelmann and Elwenspoek, {Michael Curt}",
    year = "2010",
    month = "9",
    language = "Undefined",
    isbn = "978-90-81673716",
    publisher = "University of Twente - Transducers Science and Technology (TST)",
    pages = "193--196",
    booktitle = "Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)",

    }

    Engelen, JBC, de Boer, HL, de Boer, H, Beekman, JG, Been, AJ, Folkertsma, GA, Folkertsma, GA, Fortgens, L, de Graaf, D, Vocke, S, Woldering, LA, Abelmann, L & Elwenspoek, MC 2010, A Musical instrument in MEMS. in Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). University of Twente - Transducers Science and Technology (TST), Enschede, pp. 193-196, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

    A Musical instrument in MEMS. / Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, H.; Beekman, J.G.; Been, A.J.; Folkertsma, Gerrit Adriaan; Folkertsma, G.A.; Fortgens, L.; de Graaf, D.; Vocke, S.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt.

    Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede : University of Twente - Transducers Science and Technology (TST), 2010. p. 193-196.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - A Musical instrument in MEMS

    AU - Engelen, Johannes Bernardus Charles

    AU - de Boer, Hans L.

    AU - de Boer, H.

    AU - Beekman, J.G.

    AU - Been, A.J.

    AU - Folkertsma, Gerrit Adriaan

    AU - Folkertsma, G.A.

    AU - Fortgens, L.

    AU - de Graaf, D.

    AU - Vocke, S.

    AU - Woldering, L.A.

    AU - Abelmann, Leon

    AU - Elwenspoek, Michael Curt

    PY - 2010/9

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    N2 - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

    AB - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

    KW - METIS-275712

    KW - Comb drive

    KW - IR-74825

    KW - TST-SMI: Formerly in EWI-SMI

    KW - EWI-18876

    KW - capacitive sensor

    KW - TST-uSPAM: micro Scanning Probe Array Memory

    KW - Musical instrument

    M3 - Conference contribution

    SN - 978-90-81673716

    SP - 193

    EP - 196

    BT - Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)

    PB - University of Twente - Transducers Science and Technology (TST)

    CY - Enschede

    ER -

    Engelen JBC, de Boer HL, de Boer H, Beekman JG, Been AJ, Folkertsma GA et al. A Musical instrument in MEMS. In Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede: University of Twente - Transducers Science and Technology (TST). 2010. p. 193-196