Abstract
In this work we describe a MEMS
instrument that resonates at audible frequencies,
and with which music can be made. The sounds are
generated by mechanical resonators and capacitive
displacement sensors. Damping by air scales unfavourably
for generating audible frequencies with
small devices. Therefore a vacuum of 1.5 mbar is
used to increase the quality factor and consequently
the duration of the sounds to around 0.25 s. The
instrument will be demonstrated during the MME
2010 conference opening, in a musical composition
especially made for the occasion.
Original language | English |
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Title of host publication | Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010) |
Place of Publication | Enschede |
Publisher | University of Twente - Transducers Science and Technology (TST) |
Pages | 193-196 |
Number of pages | 4 |
ISBN (Print) | 978-90-81673716 |
Publication status | Published - Sept 2010 |
Event | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21 |
Workshop
Workshop | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 |
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Abbreviated title | MME |
Country/Territory | Netherlands |
City | Enschede |
Period | 26/09/10 → 29/09/10 |
Keywords
- Comb drive
- TST-SMI: Formerly in EWI-SMI
- capacitive sensor
- TST-uSPAM: micro Scanning Probe Array Memory
- Musical instrument