A Musical instrument in MEMS

Johannes Bernardus Charles Engelen, Hans L. de Boer, H. de Boer, J.G. Beekman, A.J. Been, Gerrit Adriaan Folkertsma, G.A. Folkertsma, L. Fortgens, D. de Graaf, S. Vocke, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.
Original languageUndefined
Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
Place of PublicationEnschede
PublisherUniversity of Twente - Transducers Science and Technology (TST)
Pages193-196
Number of pages4
ISBN (Print)978-90-81673716
Publication statusPublished - Sep 2010
Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
Duration: 26 Sep 201029 Sep 2010
Conference number: 21

Publication series

Name
PublisherUniversity of Twente, Transducers Science and Technology (TST)

Workshop

Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated titleMME
CountryNetherlands
CityEnschede
Period26/09/1029/09/10

Keywords

  • METIS-275712
  • Comb drive
  • IR-74825
  • TST-SMI: Formerly in EWI-SMI
  • EWI-18876
  • capacitive sensor
  • TST-uSPAM: micro Scanning Probe Array Memory
  • Musical instrument

Cite this

Engelen, J. B. C., de Boer, H. L., de Boer, H., Beekman, J. G., Been, A. J., Folkertsma, G. A., ... Elwenspoek, M. C. (2010). A Musical instrument in MEMS. In Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010) (pp. 193-196). Enschede: University of Twente - Transducers Science and Technology (TST).
Engelen, Johannes Bernardus Charles ; de Boer, Hans L. ; de Boer, H. ; Beekman, J.G. ; Been, A.J. ; Folkertsma, Gerrit Adriaan ; Folkertsma, G.A. ; Fortgens, L. ; de Graaf, D. ; Vocke, S. ; Woldering, L.A. ; Abelmann, Leon ; Elwenspoek, Michael Curt. / A Musical instrument in MEMS. Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede : University of Twente - Transducers Science and Technology (TST), 2010. pp. 193-196
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title = "A Musical instrument in MEMS",
abstract = "In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.",
keywords = "METIS-275712, Comb drive, IR-74825, TST-SMI: Formerly in EWI-SMI, EWI-18876, capacitive sensor, TST-uSPAM: micro Scanning Probe Array Memory, Musical instrument",
author = "Engelen, {Johannes Bernardus Charles} and {de Boer}, {Hans L.} and {de Boer}, H. and J.G. Beekman and A.J. Been and Folkertsma, {Gerrit Adriaan} and G.A. Folkertsma and L. Fortgens and {de Graaf}, D. and S. Vocke and L.A. Woldering and Leon Abelmann and Elwenspoek, {Michael Curt}",
year = "2010",
month = "9",
language = "Undefined",
isbn = "978-90-81673716",
publisher = "University of Twente - Transducers Science and Technology (TST)",
pages = "193--196",
booktitle = "Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)",

}

Engelen, JBC, de Boer, HL, de Boer, H, Beekman, JG, Been, AJ, Folkertsma, GA, Folkertsma, GA, Fortgens, L, de Graaf, D, Vocke, S, Woldering, LA, Abelmann, L & Elwenspoek, MC 2010, A Musical instrument in MEMS. in Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). University of Twente - Transducers Science and Technology (TST), Enschede, pp. 193-196, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

A Musical instrument in MEMS. / Engelen, Johannes Bernardus Charles; de Boer, Hans L.; de Boer, H.; Beekman, J.G.; Been, A.J.; Folkertsma, Gerrit Adriaan; Folkertsma, G.A.; Fortgens, L.; de Graaf, D.; Vocke, S.; Woldering, L.A.; Abelmann, Leon; Elwenspoek, Michael Curt.

Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede : University of Twente - Transducers Science and Technology (TST), 2010. p. 193-196.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - A Musical instrument in MEMS

AU - Engelen, Johannes Bernardus Charles

AU - de Boer, Hans L.

AU - de Boer, H.

AU - Beekman, J.G.

AU - Been, A.J.

AU - Folkertsma, Gerrit Adriaan

AU - Folkertsma, G.A.

AU - Fortgens, L.

AU - de Graaf, D.

AU - Vocke, S.

AU - Woldering, L.A.

AU - Abelmann, Leon

AU - Elwenspoek, Michael Curt

PY - 2010/9

Y1 - 2010/9

N2 - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

AB - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

KW - METIS-275712

KW - Comb drive

KW - IR-74825

KW - TST-SMI: Formerly in EWI-SMI

KW - EWI-18876

KW - capacitive sensor

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - Musical instrument

M3 - Conference contribution

SN - 978-90-81673716

SP - 193

EP - 196

BT - Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)

PB - University of Twente - Transducers Science and Technology (TST)

CY - Enschede

ER -

Engelen JBC, de Boer HL, de Boer H, Beekman JG, Been AJ, Folkertsma GA et al. A Musical instrument in MEMS. In Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede: University of Twente - Transducers Science and Technology (TST). 2010. p. 193-196