A Musical instrument in MEMS

Johannes Bernardus Charles Engelen, Hans L. de Boer, H. de Boer, J.G. Beekman, A.J. Been, Gerrit Adriaan Folkertsma, G.A. Folkertsma, L. Fortgens, D. de Graaf, S. Vocke, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    PublisherUniversity of Twente, Transducers Science and Technology (TST)


    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME


    • METIS-275712
    • Comb drive
    • IR-74825
    • TST-SMI: Formerly in EWI-SMI
    • EWI-18876
    • capacitive sensor
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Musical instrument

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