A Musical instrument in MEMS

J.B.C. Engelen; H. de Boer; J.G. Beekman; A.J. Been; G.A. Folkertsma; L.C. Fortgens; D.B. de Graaf; S. Vocke; L.A. Woldering; L. Abelmann; M.C. Elwenspoek

A Musical instrument in MEMS

J.B.C. Engelen
, H. de Boer
, J.G. Beekman
, A.J. Been
, G.A. Folkertsma
, L.C. Fortgens
, D.B. de Graaf
, S. Vocke
, L.A. Woldering
, L. Abelmann
, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

81 Downloads (Pure)

Abstract

In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

Original language	English
Title of host publication	21st Micromechanics and Micro systems Europe workshop, MME 2010
Subtitle of host publication	Abstracts
Editors	Leon Abelmann, Hans Groenland, Joost van Honschoten, Hein Verputten
Place of Publication	Enschede
Publisher	University of Twente - Transducers Science and Technology (TST)
Pages	193-196
Number of pages	4
ISBN (Print)	978-90-816737-1-6
Publication status	Published - Sept 2010
Event	21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21

Workshop

Workshop	21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated title	MME
Country/Territory	Netherlands
City	Enschede
Period	26/09/10 → 29/09/10

Keywords

Comb drive
TST-SMI: Formerly in EWI-SMI
Capacitive sensor
TST-uSPAM: micro Scanning Probe Array Memory
Musical instrument

Access to Document

ArticleFinal published version, 1.11 MB

MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts
Abelmann, L. (Editor), Groenland, H. (Editor), van Honschoten, J. (Editor) & Verputten, H. (Editor), Sept 2010, Enschede, The Netherlands: University of Twente, Transducers Science and Technology. 326 p.
Research output: Book/Report › Book editing › Academic

Open Access
File

Cite this

Engelen, J. B. C., de Boer, H., Beekman, J. G., Been, A. J., Folkertsma, G. A., Fortgens, L. C., de Graaf, D. B., Vocke, S., Woldering, L. A., Abelmann, L., & Elwenspoek, M. C. (2010). A Musical instrument in MEMS. In L. Abelmann, H. Groenland, J. van Honschoten, & H. Verputten (Eds.), 21st Micromechanics and Micro systems Europe workshop, MME 2010: Abstracts (pp. 193-196). University of Twente - Transducers Science and Technology (TST).

@inproceedings{ca64ef17d3c74b428b5724872d3b7041,

title = "A Musical instrument in MEMS",

abstract = "In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.",

keywords = "Comb drive, TST-SMI: Formerly in EWI-SMI, Capacitive sensor, TST-uSPAM: micro Scanning Probe Array Memory, Musical instrument",

author = "J.B.C. Engelen and \{de Boer\}, H. and J.G. Beekman and A.J. Been and G.A. Folkertsma and L.C. Fortgens and \{de Graaf\}, D.B. and S. Vocke and L.A. Woldering and L. Abelmann and M.C. Elwenspoek",

year = "2010",

month = sep,

language = "English",

isbn = "978-90-816737-1-6",

pages = "193--196",

editor = "Leon Abelmann and Hans Groenland and \{van Honschoten\}, Joost and Hein Verputten",

booktitle = "21st Micromechanics and Micro systems Europe workshop, MME 2010",

publisher = "University of Twente - Transducers Science and Technology (TST)",

note = "21st Micromechanics and Microsystems Europe Workshop, MME 2010, MME ; Conference date: 26-09-2010 Through 29-09-2010",

}

Engelen, JBC, de Boer, H, Beekman, JG, Been, AJ, Folkertsma, GA, Fortgens, LC, de Graaf, DB, Vocke, S, Woldering, LA, Abelmann, L & Elwenspoek, MC 2010, A Musical instrument in MEMS. in L Abelmann, H Groenland, J van Honschoten & H Verputten (eds), 21st Micromechanics and Micro systems Europe workshop, MME 2010: Abstracts. University of Twente - Transducers Science and Technology (TST), Enschede, pp. 193-196, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

A Musical instrument in MEMS. / Engelen, J.B.C.; de Boer, H.; Beekman, J.G. et al.
21st Micromechanics and Micro systems Europe workshop, MME 2010: Abstracts. ed. / Leon Abelmann; Hans Groenland; Joost van Honschoten; Hein Verputten. Enschede: University of Twente - Transducers Science and Technology (TST), 2010. p. 193-196.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - A Musical instrument in MEMS

AU - Engelen, J.B.C.

AU - de Boer, H.

AU - Beekman, J.G.

AU - Been, A.J.

AU - Folkertsma, G.A.

AU - Fortgens, L.C.

AU - de Graaf, D.B.

AU - Vocke, S.

AU - Woldering, L.A.

AU - Abelmann, L.

AU - Elwenspoek, M.C.

N1 - Conference code: 21

PY - 2010/9

Y1 - 2010/9

N2 - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

AB - In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.

KW - Comb drive

KW - TST-SMI: Formerly in EWI-SMI

KW - Capacitive sensor

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - Musical instrument

M3 - Conference contribution

SN - 978-90-816737-1-6

SP - 193

EP - 196

BT - 21st Micromechanics and Micro systems Europe workshop, MME 2010

A2 - Abelmann, Leon

A2 - Groenland, Hans

A2 - van Honschoten, Joost

A2 - Verputten, Hein

PB - University of Twente - Transducers Science and Technology (TST)

CY - Enschede

T2 - 21st Micromechanics and Microsystems Europe Workshop, MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -

A Musical instrument in MEMS

Abstract

Workshop

Keywords

Access to Document

Fingerprint

Research output

MME 2010, 21st Micromechanics and Micro systems Europe Workshop: Abstracts

Cite this