A Musical instrument in MEMS

Johannes Bernardus Charles Engelen, Hans L. de Boer, H. de Boer, J.G. Beekman, A.J. Been, Gerrit Adriaan Folkertsma, G.A. Folkertsma, L. Fortgens, D. de Graaf, S. Vocke, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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