A Musical instrument in MEMS

J.B.C. Engelen, H. de Boer, J.G. Beekman, A.J. Been, G.A. Folkertsma, L.C. Fortgens, D.B. de Graaf, S. Vocke, L.A. Woldering, L. Abelmann, M.C. Elwenspoek

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