A new ammonia sensor based on a porous SiC membrane

E. J. Connolly; B. Timmer; H. T.M. Pham; J. Groeneweg; P. M. Sarro; W. Olthuis; P. J. French

doi:10.1109/SENSOR.2005.1497451

A new ammonia sensor based on a porous SiC membrane

E. J. Connolly^*, B. Timmer, H. T.M. Pham, J. Groeneweg, P. M. Sarro, W. Olthuis, P. J. French

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

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Abstract

Porous SiC has been found to be extremely sensitive to the presence of ammonia (NH₃) gas. We report the fabrication and preliminary characterisation of NH₃ sensors based on porous SiC and Al electrodes. The idea of the SiC is that it is a very durable material and that it should be good for sensors in harsh environments. Until now the only NH ₃ sensors using SiC have been FET based, and the SiC was not porous. The SiC was deposited by PECVD on standard p-type single-crystal Si and was made porous by electrochemical etching in 73% HF and anodisation current-densities of 1-50mA/cm², Because the etch-rate of Al in 73% HF is very low, we can use Al electrodes instead of Au. This also facilitates our sensor fabrication, as Al is more cleanroom friendly than Au. Preliminary data is given for our devices response to NH₃ in the range 0-10ppm NH₃ in dry N₂ carrier gas.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1832-1835
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497451
Publication status	Published - 9 Nov 2005
Event	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 Conference number: 13

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Conference

Conference	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
Abbreviated title	TRANSDUCERS
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Al electrodes
NH sensor
Porous SiC

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10.1109/SENSOR.2005.1497451

Cite this

Connolly, E. J., Timmer, B., Pham, H. T. M., Groeneweg, J., Sarro, P. M., Olthuis, W., & French, P. J. (2005). A new ammonia sensor based on a porous SiC membrane. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1832-1835). (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497451

Connolly, E. J. ; Timmer, B. ; Pham, H. T.M. et al. / A new ammonia sensor based on a porous SiC membrane. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1832-1835 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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title = "A new ammonia sensor based on a porous SiC membrane",

abstract = "Porous SiC has been found to be extremely sensitive to the presence of ammonia (NH3) gas. We report the fabrication and preliminary characterisation of NH3 sensors based on porous SiC and Al electrodes. The idea of the SiC is that it is a very durable material and that it should be good for sensors in harsh environments. Until now the only NH 3 sensors using SiC have been FET based, and the SiC was not porous. The SiC was deposited by PECVD on standard p-type single-crystal Si and was made porous by electrochemical etching in 73% HF and anodisation current-densities of 1-50mA/cm2, Because the etch-rate of Al in 73% HF is very low, we can use Al electrodes instead of Au. This also facilitates our sensor fabrication, as Al is more cleanroom friendly than Au. Preliminary data is given for our devices response to NH3 in the range 0-10ppm NH3 in dry N2 carrier gas.",

keywords = "Al electrodes, NH sensor, Porous SiC",

author = "Connolly, {E. J.} and B. Timmer and Pham, {H. T.M.} and J. Groeneweg and Sarro, {P. M.} and W. Olthuis and French, {P. J.}",

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doi = "10.1109/SENSOR.2005.1497451",

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Connolly, EJ, Timmer, B, Pham, HTM, Groeneweg, J, Sarro, PM, Olthuis, W & French, PJ 2005, A new ammonia sensor based on a porous SiC membrane. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1832-1835, 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1497451

A new ammonia sensor based on a porous SiC membrane. / Connolly, E. J.; Timmer, B.; Pham, H. T.M. et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1832-1835 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Connolly, E. J.

AU - Timmer, B.

AU - Pham, H. T.M.

AU - Groeneweg, J.

AU - Sarro, P. M.

AU - Olthuis, W.

AU - French, P. J.

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PY - 2005/11/9

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N2 - Porous SiC has been found to be extremely sensitive to the presence of ammonia (NH3) gas. We report the fabrication and preliminary characterisation of NH3 sensors based on porous SiC and Al electrodes. The idea of the SiC is that it is a very durable material and that it should be good for sensors in harsh environments. Until now the only NH 3 sensors using SiC have been FET based, and the SiC was not porous. The SiC was deposited by PECVD on standard p-type single-crystal Si and was made porous by electrochemical etching in 73% HF and anodisation current-densities of 1-50mA/cm2, Because the etch-rate of Al in 73% HF is very low, we can use Al electrodes instead of Au. This also facilitates our sensor fabrication, as Al is more cleanroom friendly than Au. Preliminary data is given for our devices response to NH3 in the range 0-10ppm NH3 in dry N2 carrier gas.

AB - Porous SiC has been found to be extremely sensitive to the presence of ammonia (NH3) gas. We report the fabrication and preliminary characterisation of NH3 sensors based on porous SiC and Al electrodes. The idea of the SiC is that it is a very durable material and that it should be good for sensors in harsh environments. Until now the only NH 3 sensors using SiC have been FET based, and the SiC was not porous. The SiC was deposited by PECVD on standard p-type single-crystal Si and was made porous by electrochemical etching in 73% HF and anodisation current-densities of 1-50mA/cm2, Because the etch-rate of Al in 73% HF is very low, we can use Al electrodes instead of Au. This also facilitates our sensor fabrication, as Al is more cleanroom friendly than Au. Preliminary data is given for our devices response to NH3 in the range 0-10ppm NH3 in dry N2 carrier gas.

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SN - 9780780389946

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T2 - 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005

Y2 - 5 June 2005 through 9 June 2005

ER -

Connolly EJ, Timmer B, Pham HTM, Groeneweg J, Sarro PM, Olthuis W et al. A new ammonia sensor based on a porous SiC membrane. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1832-1835. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1497451

A new ammonia sensor based on a porous SiC membrane

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