A new ammonia sensor based on a porous SiC membrane

E. J. Connolly*, B. Timmer, H. T.M. Pham, J. Groeneweg, P. M. Sarro, W. Olthuis, P. J. French

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    Porous SiC has been found to be extremely sensitive to the presence of ammonia (NH3) gas. We report the fabrication and preliminary characterisation of NH3 sensors based on porous SiC and Al electrodes. The idea of the SiC is that it is a very durable material and that it should be good for sensors in harsh environments. Until now the only NH 3 sensors using SiC have been FET based, and the SiC was not porous. The SiC was deposited by PECVD on standard p-type single-crystal Si and was made porous by electrochemical etching in 73% HF and anodisation current-densities of 1-50mA/cm2, Because the etch-rate of Al in 73% HF is very low, we can use Al electrodes instead of Au. This also facilitates our sensor fabrication, as Al is more cleanroom friendly than Au. Preliminary data is given for our devices response to NH3 in the range 0-10ppm NH3 in dry N2 carrier gas.

    Original languageEnglish
    Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
    Pages1832-1835
    Number of pages4
    DOIs
    Publication statusPublished - 9 Nov 2005
    Event13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of
    Duration: 5 Jun 20059 Jun 2005
    Conference number: 13

    Publication series

    NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    Volume2

    Conference

    Conference13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
    Abbreviated titleTRANSDUCERS
    CountryKorea, Republic of
    CitySeoul
    Period5/06/059/06/05

    Keywords

    • Al electrodes
    • NH sensor
    • Porous SiC

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