A new concept in magnetic force microscope cantilevers

A.G. van den Bos; A.C.J. van Dijk; I.R. Heskamp; Leon Abelmann; J.C. Lodder

A new concept in magnetic force microscope cantilevers

A.G. van den Bos, A.C.J. van Dijk, I.R. Heskamp, Leon Abelmann, J.C. Lodder

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

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Abstract

In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.

Original language	Undefined
Title of host publication	Magnetic Storage Systems beyond 2000
Editors	G.C. Hadjipanayis
Place of Publication	Dordrecht
Publisher	Kluwer Academic Publishers
Pages	307-312
Number of pages	6
ISBN (Print)	1-4020-0117-7
Publication status	Published - 2001

Publication series

Name	NATO SCIENCE SERIES
Publisher	Kluwer Academic Publishers
Number	41
Volume	II: Mathematics, Physics and Chemistry

Keywords

SMI-TST: From 2006 in EWI-TST
TST-uSPAM: micro Scanning Probe Array Memory
TST-MFM: Magnetic Force Microscope
SMI-EXP: EXPERIMENTAL TECHNIQUES

Cite this

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title = "A new concept in magnetic force microscope cantilevers",

abstract = "In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.",

keywords = "SMI-TST: From 2006 in EWI-TST, TST-uSPAM: micro Scanning Probe Array Memory, TST-MFM: Magnetic Force Microscope, SMI-EXP: EXPERIMENTAL TECHNIQUES",

author = "{van den Bos}, A.G. and {van Dijk}, A.C.J. and I.R. Heskamp and Leon Abelmann and J.C. Lodder",

note = "Imported from SMI Reference manager",

year = "2001",

language = "Undefined",

isbn = "1-4020-0117-7",

series = "NATO SCIENCE SERIES",

publisher = "Kluwer Academic Publishers",

number = "41",

pages = "307--312",

editor = "G.C. Hadjipanayis",

booktitle = "Magnetic Storage Systems beyond 2000",

address = "Netherlands",

}

A new concept in magnetic force microscope cantilevers. / van den Bos, A.G.; van Dijk, A.C.J.; Heskamp, I.R. et al.
Magnetic Storage Systems beyond 2000. ed. / G.C. Hadjipanayis. Dordrecht: Kluwer Academic Publishers, 2001. p. 307-312 (NATO SCIENCE SERIES; Vol. II: Mathematics, Physics and Chemistry, No. 41).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

TY - CHAP

T1 - A new concept in magnetic force microscope cantilevers

AU - van den Bos, A.G.

AU - van Dijk, A.C.J.

AU - Heskamp, I.R.

AU - Abelmann, Leon

AU - Lodder, J.C.

N1 - Imported from SMI Reference manager

PY - 2001

Y1 - 2001

N2 - In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.

AB - In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.

KW - SMI-TST: From 2006 in EWI-TST

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TST-MFM: Magnetic Force Microscope

KW - SMI-EXP: EXPERIMENTAL TECHNIQUES

M3 - Chapter

SN - 1-4020-0117-7

T3 - NATO SCIENCE SERIES

SP - 307

EP - 312

BT - Magnetic Storage Systems beyond 2000

A2 - Hadjipanayis, G.C.

PB - Kluwer Academic Publishers

CY - Dordrecht

ER -