A new concept in magnetic force microscope cantilevers

A.G. van den Bos, A.C.J. van Dijk, I.R. Heskamp, Leon Abelmann, J.C. Lodder

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    In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.
    Original languageUndefined
    Title of host publicationMagnetic Storage Systems beyond 2000
    EditorsG.C. Hadjipanayis
    Place of PublicationDordrecht
    PublisherKluwer Academic Publishers
    Number of pages6
    ISBN (Print)1-4020-0117-7
    Publication statusPublished - 2001

    Publication series

    PublisherKluwer Academic Publishers
    VolumeII: Mathematics, Physics and Chemistry


    • SMI-TST: From 2006 in EWI-TST
    • TST-uSPAM: micro Scanning Probe Array Memory
    • TST-MFM: Magnetic Force Microscope

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