Abstract
| Original language | English |
|---|---|
| Title of host publication | Sensor technology in the Netherlands - state of the art |
| Subtitle of host publication | proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands |
| Editors | A. van den Berg, P. Bergveld |
| Place of Publication | Dordrecht |
| Publisher | Kluwer Academic Publishers |
| Pages | 85-90 |
| ISBN (Electronic) | 978-94-011-5010-1 |
| ISBN (Print) | 978-94-010-6103-2 |
| DOIs | |
| Publication status | Published - 2 Mar 1998 |
| Event | Dutch Sensor Conference 1998: Sensor Technology in the Netherlands: State of the Art - University of Twente, Enschede, Netherlands Duration: 2 Mar 1998 → 3 Mar 1998 |
Publication series
| Name | MESA monographs |
|---|---|
| Publisher | Kluwer Academic |
| Volume | 2 |
Conference
| Conference | Dutch Sensor Conference 1998 |
|---|---|
| Country | Netherlands |
| City | Enschede |
| Period | 2/03/98 → 3/03/98 |
Fingerprint
Keywords
- μ-TAS
- Valves
- Etching
- Simulation
Cite this
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A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. / Oosterbroek, R.E.; Berenschot, J.W.; Schlautmann, S.; Lammerink, T.S.J.; van den Berg, A.; Elwenspoek, M.C.
Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. ed. / A. van den Berg; P. Bergveld. Dordrecht : Kluwer Academic Publishers, 1998. p. 85-90 (MESA monographs; Vol. 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems
AU - Oosterbroek, R.E.
AU - Berenschot, J.W.
AU - Schlautmann, S.
AU - Lammerink, T.S.J.
AU - van den Berg, A.
AU - Elwenspoek, M.C.
PY - 1998/3/2
Y1 - 1998/3/2
N2 - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.
AB - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.
KW - μ-TAS
KW - Valves
KW - Etching
KW - Simulation
U2 - 10.1007/978-94-011-5010-1_13
DO - 10.1007/978-94-011-5010-1_13
M3 - Conference contribution
SN - 978-94-010-6103-2
T3 - MESA monographs
SP - 85
EP - 90
BT - Sensor technology in the Netherlands - state of the art
A2 - van den Berg, A.
A2 - Bergveld, P.
PB - Kluwer Academic Publishers
CY - Dordrecht
ER -