A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

R.E. Oosterbroek; J.W. Berenschot; S. Schlautmann; T.S.J. Lammerink; A. van den Berg; M.C. Elwenspoek

doi:10.1007/978-94-011-5010-1_13

A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

R.E. Oosterbroek, J.W. Berenschot, S. Schlautmann, T.S.J. Lammerink, A. van den Berg, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.

Original language	English
Title of host publication	Sensor technology in the Netherlands - state of the art
Subtitle of host publication	proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands
Editors	A. van den Berg, P. Bergveld
Place of Publication	Dordrecht
Publisher	Kluwer Academic Publishers
Pages	85-90
ISBN (Electronic)	978-94-011-5010-1
ISBN (Print)	978-94-010-6103-2
DOIs	https://doi.org/10.1007/978-94-011-5010-1_13
Publication status	Published - 2 Mar 1998
Event	Dutch Sensor Conference 1998: Sensor Technology in the Netherlands: State of the Art - University of Twente, Enschede, Netherlands Duration: 2 Mar 1998 → 3 Mar 1998

Publication series

Name	MESA monographs
Publisher	Kluwer Academic
Volume	2

Conference

Conference	Dutch Sensor Conference 1998
Country	Netherlands
City	Enschede
Period	2/03/98 → 3/03/98

Keywords

μ-TAS
Valves
Etching
Simulation

Access to Document

10.1007/978-94-011-5010-1_13

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Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1998). A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In A. van den Berg, & P. Bergveld (Eds.), Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands (pp. 85-90). (MESA monographs; Vol. 2). Dordrecht: Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5010-1_13

Oosterbroek, R.E. ; Berenschot, J.W. ; Schlautmann, S. ; Lammerink, T.S.J. ; van den Berg, A. ; Elwenspoek, M.C. / A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. editor / A. van den Berg ; P. Bergveld. Dordrecht : Kluwer Academic Publishers, 1998. pp. 85-90 (MESA monographs).

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title = "A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems",

abstract = "This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.",

keywords = "μ-TAS, Valves, Etching, Simulation",

author = "R.E. Oosterbroek and J.W. Berenschot and S. Schlautmann and T.S.J. Lammerink and {van den Berg}, A. and M.C. Elwenspoek",

year = "1998",

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doi = "10.1007/978-94-011-5010-1_13",

language = "English",

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Oosterbroek, RE, Berenschot, JW , Schlautmann, S , Lammerink, TSJ , van den Berg, A & Elwenspoek, MC 1998, A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. in A van den Berg & P Bergveld (eds), Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. MESA monographs, vol. 2, Kluwer Academic Publishers, Dordrecht, pp. 85-90, Dutch Sensor Conference 1998, Enschede, Netherlands, 2/03/98. https://doi.org/10.1007/978-94-011-5010-1_13

A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. / Oosterbroek, R.E.; Berenschot, J.W.; Schlautmann, S.; Lammerink, T.S.J.; van den Berg, A.; Elwenspoek, M.C.

Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. ed. / A. van den Berg; P. Bergveld. Dordrecht : Kluwer Academic Publishers, 1998. p. 85-90 (MESA monographs; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

AU - Oosterbroek, R.E.

AU - Berenschot, J.W.

AU - Schlautmann, S.

AU - Lammerink, T.S.J.

AU - van den Berg, A.

AU - Elwenspoek, M.C.

PY - 1998/3/2

Y1 - 1998/3/2

N2 - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.

AB - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.

KW - μ-TAS

KW - Valves

KW - Etching

KW - Simulation

U2 - 10.1007/978-94-011-5010-1_13

DO - 10.1007/978-94-011-5010-1_13

M3 - Conference contribution

SN - 978-94-010-6103-2

T3 - MESA monographs

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BT - Sensor technology in the Netherlands - state of the art

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Oosterbroek RE, Berenschot JW , Schlautmann S , Lammerink TSJ , van den Berg A, Elwenspoek MC. A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In van den Berg A, Bergveld P, editors, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. Dordrecht: Kluwer Academic Publishers. 1998. p. 85-90. (MESA monographs). https://doi.org/10.1007/978-94-011-5010-1_13