A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.
Original languageEnglish
Title of host publicationSensor technology in the Netherlands - state of the art
Subtitle of host publicationproceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands
EditorsA. van den Berg, P. Bergveld
Place of PublicationDordrecht
PublisherKluwer Academic Publishers
Pages85-90
ISBN (Electronic)978-94-011-5010-1
ISBN (Print)978-94-010-6103-2
DOIs
Publication statusPublished - 2 Mar 1998
EventDutch Sensor Conference 1998: Sensor Technology in the Netherlands: State of the Art - University of Twente, Enschede, Netherlands
Duration: 2 Mar 19983 Mar 1998

Publication series

NameMESA monographs
PublisherKluwer Academic
Volume2

Conference

ConferenceDutch Sensor Conference 1998
CountryNetherlands
CityEnschede
Period2/03/983/03/98

Fingerprint

Wet etching
Controllability
Fabrication
Microstructure
Fluids
Computer simulation

Keywords

  • μ-TAS
  • Valves
  • Etching
  • Simulation

Cite this

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1998). A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In A. van den Berg, & P. Bergveld (Eds.), Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands (pp. 85-90). (MESA monographs; Vol. 2). Dordrecht: Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5010-1_13
Oosterbroek, R.E. ; Berenschot, J.W. ; Schlautmann, S. ; Lammerink, T.S.J. ; van den Berg, A. ; Elwenspoek, M.C. / A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. editor / A. van den Berg ; P. Bergveld. Dordrecht : Kluwer Academic Publishers, 1998. pp. 85-90 (MESA monographs).
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title = "A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems",
abstract = "This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.",
keywords = "μ-TAS, Valves, Etching, Simulation",
author = "R.E. Oosterbroek and J.W. Berenschot and S. Schlautmann and T.S.J. Lammerink and {van den Berg}, A. and M.C. Elwenspoek",
year = "1998",
month = "3",
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language = "English",
isbn = "978-94-010-6103-2",
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Oosterbroek, RE, Berenschot, JW, Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1998, A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. in A van den Berg & P Bergveld (eds), Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. MESA monographs, vol. 2, Kluwer Academic Publishers, Dordrecht, pp. 85-90, Dutch Sensor Conference 1998, Enschede, Netherlands, 2/03/98. https://doi.org/10.1007/978-94-011-5010-1_13

A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. / Oosterbroek, R.E.; Berenschot, J.W.; Schlautmann, S.; Lammerink, T.S.J.; van den Berg, A.; Elwenspoek, M.C.

Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. ed. / A. van den Berg; P. Bergveld. Dordrecht : Kluwer Academic Publishers, 1998. p. 85-90 (MESA monographs; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

AU - Oosterbroek, R.E.

AU - Berenschot, J.W.

AU - Schlautmann, S.

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N2 - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.

AB - This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.

KW - μ-TAS

KW - Valves

KW - Etching

KW - Simulation

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DO - 10.1007/978-94-011-5010-1_13

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SN - 978-94-010-6103-2

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Oosterbroek RE, Berenschot JW, Schlautmann S, Lammerink TSJ, van den Berg A, Elwenspoek MC. A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In van den Berg A, Bergveld P, editors, Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands. Dordrecht: Kluwer Academic Publishers. 1998. p. 85-90. (MESA monographs). https://doi.org/10.1007/978-94-011-5010-1_13