@inproceedings{afcaee03a5f74805bdfd3ec5643e0bb5,
title = "A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems",
abstract = "This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.",
keywords = "μ-TAS, Valves, Etching, Simulation",
author = "R.E. Oosterbroek and J.W. Berenschot and S. Schlautmann and T.S.J. Lammerink and {van den Berg}, A. and M.C. Elwenspoek",
year = "1998",
month = mar,
day = "2",
doi = "10.1007/978-94-011-5010-1_13",
language = "English",
isbn = "978-94-010-6103-2",
series = "MESA monographs",
publisher = "Kluwer Academic Publishers",
pages = "85--90",
editor = "{van den Berg}, A. and P. Bergveld",
booktitle = "Sensor technology in the Netherlands - state of the art",
address = "Netherlands",
note = "Dutch Sensor Conference 1998 : Sensor Technology in the Netherlands: State of the Art ; Conference date: 02-03-1998 Through 03-03-1998",
}