A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems

R.E. Oosterbroek, J.W. Berenschot, S. Schlautmann, T.S.J. Lammerink, A. van den Berg, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.
    Original languageEnglish
    Title of host publicationSensor technology in the Netherlands - state of the art
    Subtitle of host publicationproceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands
    EditorsA. van den Berg, P. Bergveld
    Place of PublicationDordrecht
    PublisherKluwer Academic Publishers
    Pages85-90
    ISBN (Electronic)978-94-011-5010-1
    ISBN (Print)978-94-010-6103-2
    DOIs
    Publication statusPublished - 2 Mar 1998
    EventDutch Sensor Conference 1998: Sensor Technology in the Netherlands: State of the Art - University of Twente, Enschede, Netherlands
    Duration: 2 Mar 19983 Mar 1998

    Publication series

    NameMESA monographs
    PublisherKluwer Academic
    Volume2

    Conference

    ConferenceDutch Sensor Conference 1998
    CountryNetherlands
    CityEnschede
    Period2/03/983/03/98

    Keywords

    • μ-TAS
    • Valves
    • Etching
    • Simulation

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  • Cite this

    Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1998). A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In A. van den Berg, & P. Bergveld (Eds.), Sensor technology in the Netherlands - state of the art: proceedings of the Dutch Sensor Conference, 2-3 March, 1998, University of Twente, the Netherlands (pp. 85-90). (MESA monographs; Vol. 2). Dordrecht: Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5010-1_13