A new measurement concept for MEMS

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIMEKO-XV World Congress
    Place of PublicationOsaka, Japan
    Pages121-128
    Publication statusPublished - 13 Jun 1999

    Keywords

    • METIS-113189

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