A new measurement concept for MEMS

N. Damean, Paulus P.L. Regtien

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationIMEKO-XV World Congress
    Place of PublicationOsaka, Japan
    Pages121-128
    Publication statusPublished - 13 Jun 1999

    Keywords

    • METIS-113189

    Cite this

    Damean, N., & Regtien, P. P. L. (1999). A new measurement concept for MEMS. In IMEKO-XV World Congress (pp. 121-128). Osaka, Japan.
    Damean, N. ; Regtien, Paulus P.L. / A new measurement concept for MEMS. IMEKO-XV World Congress. Osaka, Japan, 1999. pp. 121-128
    @inproceedings{e4436b1cc388498ea162b7e3c9993307,
    title = "A new measurement concept for MEMS",
    keywords = "METIS-113189",
    author = "N. Damean and Regtien, {Paulus P.L.}",
    year = "1999",
    month = "6",
    day = "13",
    language = "Undefined",
    isbn = "4-907764-01-4",
    pages = "121--128",
    booktitle = "IMEKO-XV World Congress",

    }

    Damean, N & Regtien, PPL 1999, A new measurement concept for MEMS. in IMEKO-XV World Congress. Osaka, Japan, pp. 121-128.

    A new measurement concept for MEMS. / Damean, N.; Regtien, Paulus P.L.

    IMEKO-XV World Congress. Osaka, Japan, 1999. p. 121-128.

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    TY - GEN

    T1 - A new measurement concept for MEMS

    AU - Damean, N.

    AU - Regtien, Paulus P.L.

    PY - 1999/6/13

    Y1 - 1999/6/13

    KW - METIS-113189

    M3 - Conference contribution

    SN - 4-907764-01-4

    SP - 121

    EP - 128

    BT - IMEKO-XV World Congress

    CY - Osaka, Japan

    ER -

    Damean N, Regtien PPL. A new measurement concept for MEMS. In IMEKO-XV World Congress. Osaka, Japan. 1999. p. 121-128