A new measurement concept for MEMS

N. Damean, Paulus P.L. Regtien

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationIMEKO-XV World Congress
    Place of PublicationOsaka, Japan
    Pages121-128
    Publication statusPublished - 13 Jun 1999

    Keywords

    • METIS-113189

    Cite this

    Damean, N., & Regtien, P. P. L. (1999). A new measurement concept for MEMS. In IMEKO-XV World Congress (pp. 121-128). Osaka, Japan.