Original language | Undefined |
---|---|
Title of host publication | IMEKO-XV World Congress |
Place of Publication | Osaka, Japan |
Pages | 121-128 |
Publication status | Published - 13 Jun 1999 |
Keywords
- METIS-113189
Cite this
Damean, N., & Regtien, P. P. L. (1999). A new measurement concept for MEMS. In IMEKO-XV World Congress (pp. 121-128). Osaka, Japan.
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title = "A new measurement concept for MEMS",
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author = "N. Damean and Regtien, {Paulus P.L.}",
year = "1999",
month = "6",
day = "13",
language = "Undefined",
isbn = "4-907764-01-4",
pages = "121--128",
booktitle = "IMEKO-XV World Congress",
}
Damean, N & Regtien, PPL 1999, A new measurement concept for MEMS. in IMEKO-XV World Congress. Osaka, Japan, pp. 121-128.
A new measurement concept for MEMS. / Damean, N.; Regtien, Paulus P.L.
IMEKO-XV World Congress. Osaka, Japan, 1999. p. 121-128.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - A new measurement concept for MEMS
AU - Damean, N.
AU - Regtien, Paulus P.L.
PY - 1999/6/13
Y1 - 1999/6/13
KW - METIS-113189
M3 - Conference contribution
SN - 4-907764-01-4
SP - 121
EP - 128
BT - IMEKO-XV World Congress
CY - Osaka, Japan
ER -
Damean N, Regtien PPL. A new measurement concept for MEMS. In IMEKO-XV World Congress. Osaka, Japan. 1999. p. 121-128