A new method for three dimensional excimer laser micromachining, Hole Area Modulation (HAM)

T. Masuzawa; Jeroen Olde Benneker; J.J.C. Eindhoven

doi:10.1016/S0007-8506(07)62914-X

A new method for three dimensional excimer laser micromachining, Hole Area Modulation (HAM)

T. Masuzawa, Jeroen Olde Benneker, J.J.C. Eindhoven

Faculty of Engineering Technology

Research output: Contribution to journal › Article › Academic

12 Citations (Scopus)

6 Downloads (Pure)

Abstract

A new excimer laser system configuration for three dimensional (3D) micromachining, called Hole Area Modulation (HAM) method, is proposed and the feasibility of the system is experimentally confirmed. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. Since the total area of the targeted cavity is machined simultaneously, a 2.5-μm-deep, 800μm × 1600μm 3D cavity was machined in about 5s. This method can be applied for machining various kinds of microcavities in various materials. Owing to the short machining time, the fabrication of a mold with repeated shapes, for example a mold for a microlens array, will be a good application in the future.

Original language	Undefined
Pages (from-to)	139-142
Journal	CIRP annals : manufacturing technology
Volume	49
Issue number	1
DOIs	https://doi.org/10.1016/S0007-8506(07)62914-X
Publication status	Published - 2000

Keywords

Excimer laser
LBM
IR-74319
Micro machining

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/S0007-8506(07)62914-X

Cite this

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title = "A new method for three dimensional excimer laser micromachining, Hole Area Modulation (HAM)",

abstract = "A new excimer laser system configuration for three dimensional (3D) micromachining, called Hole Area Modulation (HAM) method, is proposed and the feasibility of the system is experimentally confirmed. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. Since the total area of the targeted cavity is machined simultaneously, a 2.5-μm-deep, 800μm × 1600μm 3D cavity was machined in about 5s. This method can be applied for machining various kinds of microcavities in various materials. Owing to the short machining time, the fabrication of a mold with repeated shapes, for example a mold for a microlens array, will be a good application in the future.",

keywords = "Excimer laser, LBM, IR-74319, Micro machining",

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T1 - A new method for three dimensional excimer laser micromachining, Hole Area Modulation (HAM)

AU - Masuzawa, T.

AU - Olde Benneker, Jeroen

AU - Eindhoven, J.J.C.

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Y1 - 2000

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AB - A new excimer laser system configuration for three dimensional (3D) micromachining, called Hole Area Modulation (HAM) method, is proposed and the feasibility of the system is experimentally confirmed. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. Since the total area of the targeted cavity is machined simultaneously, a 2.5-μm-deep, 800μm × 1600μm 3D cavity was machined in about 5s. This method can be applied for machining various kinds of microcavities in various materials. Owing to the short machining time, the fabrication of a mold with repeated shapes, for example a mold for a microlens array, will be a good application in the future.

KW - Excimer laser

KW - LBM

KW - IR-74319

KW - Micro machining

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DO - 10.1016/S0007-8506(07)62914-X

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