A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors

Roald M. Tiggelaar; Johan W. Berenschot; R.E. Oosterbroek; R.E. van Male; M.H.J.M. de Croon; J.C. Schouten; Albert van den Berg; Michael Curt Elwenspoek

A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors

Roald M. Tiggelaar, Johan W. Berenschot, R.E. Oosterbroek, R.E. van Male, M.H.J.M. de Croon, J.C. Schouten, Albert van den Berg, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster

Original language	Undefined
Pages	-
Publication status	Published - 8 Jun 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Abbreviated title	TRANSDUCERS 2003
Country	United States
City	Boston
Period	8/06/03 → 12/06/03

Keywords

METIS-215188

Cite this

Tiggelaar, R. M., Berenschot, J. W., Oosterbroek, R. E., van Male, R. E., de Croon, M. H. J. M., Schouten, J. C., ... Elwenspoek, M. C. (2003). A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors. -. Poster session presented at 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States.

Tiggelaar, Roald M. ; Berenschot, Johan W. ; Oosterbroek, R.E. ; van Male, R.E. ; de Croon, M.H.J.M. ; Schouten, J.C. ; van den Berg, Albert ; Elwenspoek, Michael Curt. / A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors. Poster session presented at 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States.

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title = "A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors",

keywords = "METIS-215188",

author = "Tiggelaar, {Roald M.} and Berenschot, {Johan W.} and R.E. Oosterbroek and {van Male}, R.E. and {de Croon}, M.H.J.M. and J.C. Schouten and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "2003",

month = "6",

day = "8",

language = "Undefined",

pages = "--",

note = "null ; Conference date: 08-06-2003 Through 12-06-2003",

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Tiggelaar, RM, Berenschot, JW, Oosterbroek, RE, van Male, RE, de Croon, MHJM, Schouten, JC, van den Berg, A & Elwenspoek, MC 2003, 'A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors' 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States, 8/06/03 - 12/06/03, pp. -.

A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors. / Tiggelaar, Roald M.; Berenschot, Johan W.; Oosterbroek, R.E.; van Male, R.E.; de Croon, M.H.J.M.; Schouten, J.C.; van den Berg, Albert; Elwenspoek, Michael Curt.

2003. - Poster session presented at 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States.

Research output: Contribution to conference › Poster

TY - CONF

T1 - A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors

AU - Tiggelaar, Roald M.

AU - Berenschot, Johan W.

AU - Oosterbroek, R.E.

AU - van Male, R.E.

AU - de Croon, M.H.J.M.

AU - Schouten, J.C.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 2003/6/8

Y1 - 2003/6/8

KW - METIS-215188

M3 - Poster

SP - -

ER -

Tiggelaar RM, Berenschot JW, Oosterbroek RE, van Male RE, de Croon MHJM, Schouten JC et al. A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high temperature gas microreactors. 2003. Poster session presented at 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States.