A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structure

C.J.M. Eijkel, J. Branebjerg, M. Elwenspoek, F.C.M. van de Pol

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    41 Citations (Scopus)
    Original languageEnglish
    Title of host publicationMicromechanics Europe 1990
    Subtitle of host publicationpapers from the European Workshop on Micromechanics (MME '90)
    Place of PublicationBerlin
    Pages175-179
    Number of pages5
    Publication statusPublished - 26 Nov 1990
    Event1st MicroMechanics Europe Workshop, MME 1990 - Berlin, Germany
    Duration: 26 Nov 199027 Nov 1990
    Conference number: 1

    Conference

    Conference1st MicroMechanics Europe Workshop, MME 1990
    Abbreviated titleMME
    CountryGermany
    CityBerlin
    Period26/11/9027/11/90

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