A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structure

C.J.M. Eijkel, J. Branebjerg, M. Elwenspoek, F.C.M. van de Pol

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    41 Citations (Scopus)
    Original languageEnglish
    Title of host publicationMicromechanics Europe 1990
    Subtitle of host publicationpapers from the European Workshop on Micromechanics (MME '90)
    Place of PublicationBerlin
    Number of pages5
    Publication statusPublished - 26 Nov 1990
    Event1st MicroMechanics Europe Workshop, MME 1990 - Berlin, Germany
    Duration: 26 Nov 199027 Nov 1990
    Conference number: 1


    Conference1st MicroMechanics Europe Workshop, MME 1990
    Abbreviated titleMME

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