A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structurs

C.J.M. Eijkel; J. Branebjerg; M. Elwenspoek; F.C.M. van de Pol

A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structurs

C.J.M. Eijkel, J. Branebjerg, M. Elwenspoek, F.C.M. van de Pol

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 30 Jan 1991
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991 - Nara, Japan Duration: 30 Jan 1991 → 2 Feb 1991

Conference

Conference	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991
Abbreviated title	MEMS
Country/Territory	Japan
City	Nara
Period	30/01/91 → 2/02/91

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@conference{7089c3ba1ce04269b5495a4534bcea67,

title = "A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structurs",

author = "C.J.M. Eijkel and J. Branebjerg and M. Elwenspoek and \{van de Pol\}, F.C.M.",

year = "1991",

month = jan,

day = "30",

language = "English",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991, MEMS ; Conference date: 30-01-1991 Through 02-02-1991",

}

A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structurs. / Eijkel, C.J.M.; Branebjerg, J.; Elwenspoek, M. et al.
1991. Poster session presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991, Nara, Japan.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structurs

AU - Eijkel, C.J.M.

AU - Branebjerg, J.

AU - Elwenspoek, M.

AU - van de Pol, F.C.M.

PY - 1991/1/30

Y1 - 1991/1/30

M3 - Poster

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991

Y2 - 30 January 1991 through 2 February 1991

ER -