A new YBCO thin film patterning technique for use in multilayer structures

C.A.J. Damen; G. Feld; D.H.A. Blank; H. Rogalla

A new YBCO thin film patterning technique for use in multilayer structures

C.A.J. Damen, G. Feld, D.H.A. Blank, H. Rogalla

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.

Original language	English
Title of host publication	Applied Superconductivity 1997
Subtitle of host publication	Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997
Editors	H. Rogalla, D.H.A. Blank
Place of Publication	Bristol
Pages	257-260
Number of pages	4
Publication status	Published - 19 Dec 1997
Event	3rd European Conference on Applied Superconductivity, EUCAS 1997 - Veldhoven, Netherlands Duration: 30 Jun 1997 → 3 Jul 1997 Conference number: 3

Publication series

Name	Institute of Physics Conference Series
Publisher	Institute of Physics Publishing
Number	158
ISSN (Print)	0951-3248

Conference

Conference	3rd European Conference on Applied Superconductivity, EUCAS 1997
Abbreviated title	EUCAS
Country/Territory	Netherlands
City	Veldhoven
Period	30/06/97 → 3/07/97

Keywords

IR-25624
METIS-130426

Cite this

Damen, C. A. J., Feld, G., Blank, D. H. A., & Rogalla, H. (1997). A new YBCO thin film patterning technique for use in multilayer structures. In H. Rogalla, & D. H. A. Blank (Eds.), Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997 (pp. 257-260). (Institute of Physics Conference Series; No. 158)..

Damen, C.A.J. ; Feld, G. ; Blank, D.H.A. et al. / A new YBCO thin film patterning technique for use in multilayer structures. Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997. editor / H. Rogalla ; D.H.A. Blank. Bristol, 1997. pp. 257-260 (Institute of Physics Conference Series; 158).

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title = "A new YBCO thin film patterning technique for use in multilayer structures",

abstract = "A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.",

keywords = "IR-25624, METIS-130426",

author = "C.A.J. Damen and G. Feld and D.H.A. Blank and H. Rogalla",

year = "1997",

month = dec,

day = "19",

language = "English",

isbn = "9780750304870",

series = "Institute of Physics Conference Series",

publisher = "Institute of Physics Publishing",

number = "158",

pages = "257--260",

editor = "H. Rogalla and D.H.A. Blank",

booktitle = "Applied Superconductivity 1997",

note = "3rd European Conference on Applied Superconductivity, EUCAS 1997, EUCAS ; Conference date: 30-06-1997 Through 03-07-1997",

}

Damen, CAJ, Feld, G, Blank, DHA & Rogalla, H 1997, A new YBCO thin film patterning technique for use in multilayer structures. in H Rogalla & DHA Blank (eds), Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997. Institute of Physics Conference Series, no. 158, Bristol, pp. 257-260, 3rd European Conference on Applied Superconductivity, EUCAS 1997, Veldhoven, Netherlands, 30/06/97.

A new YBCO thin film patterning technique for use in multilayer structures. / Damen, C.A.J.; Feld, G.; Blank, D.H.A. et al.
Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997. ed. / H. Rogalla; D.H.A. Blank. Bristol, 1997. p. 257-260 (Institute of Physics Conference Series; No. 158).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

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PY - 1997/12/19

Y1 - 1997/12/19

N2 - A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.

AB - A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.

KW - IR-25624

KW - METIS-130426

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SN - 9780750304856

SN - 9780750304863

T3 - Institute of Physics Conference Series

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BT - Applied Superconductivity 1997

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Damen CAJ, Feld G, Blank DHA, Rogalla H. A new YBCO thin film patterning technique for use in multilayer structures. In Rogalla H, Blank DHA, editors, Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997. Bristol. 1997. p. 257-260. (Institute of Physics Conference Series; 158).