A new YBCO thin film patterning technique for use in multilayer structures

C.A.J. Damen, G. Feld, D.H.A. Blank, H. Rogalla

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.
Original languageEnglish
Title of host publicationApplied Superconductivity 1997
Subtitle of host publicationProceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997
EditorsH. Rogalla, D.H.A. Blank
Place of PublicationBristol
Pages257-260
Number of pages4
Publication statusPublished - 19 Dec 1997
Event3rd European Conference on Applied Superconductivity, EUCAS 1997 - Veldhoven, Netherlands
Duration: 30 Jun 19973 Jul 1997
Conference number: 3

Publication series

NameInstitute of Physics Conference Series
PublisherInstitute of Physics Publishing
Number158
ISSN (Print)0951-3248

Conference

Conference3rd European Conference on Applied Superconductivity, EUCAS 1997
Abbreviated titleEUCAS
CountryNetherlands
CityVeldhoven
Period30/06/973/07/97

Keywords

  • IR-25624
  • METIS-130426

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    Damen, C. A. J., Feld, G., Blank, D. H. A., & Rogalla, H. (1997). A new YBCO thin film patterning technique for use in multilayer structures. In H. Rogalla, & D. H. A. Blank (Eds.), Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997 (pp. 257-260). (Institute of Physics Conference Series; No. 158). Bristol.