Abstract
A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.
Original language | English |
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Title of host publication | Applied Superconductivity 1997 |
Subtitle of host publication | Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997 |
Editors | H. Rogalla, D.H.A. Blank |
Place of Publication | Bristol |
Pages | 257-260 |
Number of pages | 4 |
Publication status | Published - 19 Dec 1997 |
Event | 3rd European Conference on Applied Superconductivity, EUCAS 1997 - Veldhoven, Netherlands Duration: 30 Jun 1997 → 3 Jul 1997 Conference number: 3 |
Publication series
Name | Institute of Physics Conference Series |
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Publisher | Institute of Physics Publishing |
Number | 158 |
ISSN (Print) | 0951-3248 |
Conference
Conference | 3rd European Conference on Applied Superconductivity, EUCAS 1997 |
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Abbreviated title | EUCAS |
Country/Territory | Netherlands |
City | Veldhoven |
Period | 30/06/97 → 3/07/97 |
Keywords
- IR-25624
- METIS-130426