A new patterning technique for YBa2Cu3O7-delta (YBCO) thin films has been developed. After deposition of the superconductor a thin (10-20 nm), patterned chromium layer is deposited. During a subsequent anneal step the chromium layer reacts locally with the YBCO to form an insulating Ba-Cr-O compound. By careful optimisation of the parameters during annealing, it is possible to obtain smooth and intrinsically planarised structures. This makes this technique very attractive for multilayer patterning.
|Title of host publication||Applied Superconductivity 1997|
|Subtitle of host publication||Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997|
|Editors||H. Rogalla, D.H.A. Blank|
|Place of Publication||Bristol|
|Number of pages||4|
|Publication status||Published - 19 Dec 1997|
|Event||3rd European Conference on Applied Superconductivity, EUCAS 1997 - Veldhoven, Netherlands|
Duration: 30 Jun 1997 → 3 Jul 1997
Conference number: 3
|Name||Institute of Physics Conference Series|
|Publisher||Institute of Physics Publishing|
|Conference||3rd European Conference on Applied Superconductivity, EUCAS 1997|
|Period||30/06/97 → 3/07/97|
Damen, C. A. J., Feld, G., Blank, D. H. A., & Rogalla, H. (1997). A new YBCO thin film patterning technique for use in multilayer structures. In H. Rogalla, & D. H. A. Blank (Eds.), Applied Superconductivity 1997: Proceedings of EUCAS 1997, the Third European Conference on Applied Superconductivity, held in the Netherlands, 30 June-3 July 1997 (pp. 257-260). (Institute of Physics Conference Series; No. 158). Bristol.