A normally closed active valve using bulk micromachining

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 6th International conference on New Actuators with accompanying exhibition
Place of Publication	Bremen, Germany
Pages	122-125
Publication status	Published - 17 Jun 1998

Keywords

@inproceedings{befb9c427f1a446180a6d9f660c6531e,

title = "A normally closed active valve using bulk micromachining",

keywords = "METIS-112697",

author = "Lammerink, {Theodorus S.J.} and N. Olij and Berenschot, {Johan W.} and R.E. Oosterbroek",

year = "1998",

month = jun,

day = "17",

language = "Undefined",

isbn = "3-933339-00-6",

pages = "122--125",

booktitle = "Proceedings of the 6th International conference on New Actuators with accompanying exhibition",

}

Proceedings of the 6th International conference on New Actuators with accompanying exhibition. Bremen, Germany, 1998. p. 122-125.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A normally closed active valve using bulk micromachining

AU - Lammerink, Theodorus S.J.

AU - Olij, N.

AU - Berenschot, Johan W.

AU - Oosterbroek, R.E.

PY - 1998/6/17

Y1 - 1998/6/17

KW - METIS-112697

M3 - Conference contribution

SN - 3-933339-00-6

SP - 122

EP - 125

BT - Proceedings of the 6th International conference on New Actuators with accompanying exhibition

CY - Bremen, Germany

ER -