A normally closed active valve using bulk micromachining

Theodorus S.J. Lammerink, N. Olij, Johan W. Berenschot, R.E. Oosterbroek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 6th International conference on New Actuators with accompanying exhibition
    Place of PublicationBremen, Germany
    Pages122-125
    Publication statusPublished - 17 Jun 1998

    Keywords

    • METIS-112697

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