A normally closed active valve using bulk micromachining

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 6th International conference on New Actuators with accompanying exhibition
    Place of PublicationBremen, Germany
    Pages122-125
    Publication statusPublished - 17 Jun 1998

    Keywords

    • METIS-112697

    Cite this