A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances

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    This work employs the idea of maintaining a hot surface by means of dissipating power at a nano-scale conductive link. The link is created between two polysilicon electrodes separated by a dielectric (a capacitor-like structure). From modelling, a link of 10 nm in diameter should be possible to maintain the surface temperature ranging between 750 and 1150 K within the surface diameter of 2 μm by absorbing a 3.3 mW of electric power. The devices can also be designed in such a way that the hot surface area is reduced to a sub-μm-size hotspot. The main advantage of the proposed idea is decoupling the electrical resistance and thermal resistance of the device. In this paper, two device structures based on antifuse technology are described. Both the thermo-electrical properties and feasibility to perform as a Pellistor-type gas sensor are discussed.
    Original languageUndefined
    Title of host publicationProceedings of Eurosensors 2002
    EditorsJ. Saneistr, P. Ripka
    Place of PublicationPrague
    PublisherCzech Technical University
    Number of pages4
    ISBN (Print)80-01-02576-4
    Publication statusPublished - Sep 2002
    Event16th European Conference on Solid-State Transducers, Eurosensors XVI 2002 - Czech Technical University, Prague, Czech Republic
    Duration: 15 Sep 200218 Sep 2002
    Conference number: 16


    Conference16th European Conference on Solid-State Transducers, Eurosensors XVI 2002
    Abbreviated titleEurosensors
    Country/TerritoryCzech Republic


    • IR-43834
    • EWI-15592
    • METIS-207517

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