A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Dennis Alveringh; Jarno Groenesteijn; Kechun Ma; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.13140/RG.2.1.4314.5686

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Dennis Alveringh, Jarno Groenesteijn, Kechun Ma, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.

Original language	English
Title of host publication	41st International Conference on Micro- and Nano-Engineering, MNE 2015
Place of Publication	Enschede
Publisher	University of Twente
Number of pages	1
DOIs	https://doi.org/10.13140/RG.2.1.4314.5686
Publication status	Published - 21 Sept 2015
Event	41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands Duration: 21 Sept 2015 → 24 Sept 2015 Conference number: 41

Conference

Conference	41st International Conference on Micro- and Nano-Engineering, MNE 2015
Abbreviated title	MNE
Country/Territory	Netherlands
City	The Hague
Period	21/09/15 → 24/09/15

Keywords

Capacitive readout
Flow sensor
Coriolis
MEMS
Actuation signal cancellation
TST-FLUID HANDLING

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10.13140/RG.2.1.4314.5686

AbstractFinal published version, 1.32 MB

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title = "A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning",

abstract = "We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.",

keywords = "Capacitive readout, Flow sensor, Coriolis, MEMS, Actuation signal cancellation, TST-FLUID HANDLING",

author = "Dennis Alveringh and Jarno Groenesteijn and Kechun Ma and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

year = "2015",

month = sep,

day = "21",

doi = "10.13140/RG.2.1.4314.5686",

language = "English",

booktitle = "41st International Conference on Micro- and Nano-Engineering, MNE 2015",

publisher = "University of Twente",

address = "Netherlands",

note = "41st International Conference on Micro- and Nano-Engineering, MNE 2015, MNE ; Conference date: 21-09-2015 Through 24-09-2015",

}

Alveringh, D , Groenesteijn, J , Ma, K , Wiegerink, RJ & Lötters, JC 2015, A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. in 41st International Conference on Micro- and Nano-Engineering, MNE 2015. University of Twente, Enschede, 41st International Conference on Micro- and Nano-Engineering, MNE 2015, The Hague, Netherlands, 21/09/15. https://doi.org/10.13140/RG.2.1.4314.5686

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. / Alveringh, Dennis ; Groenesteijn, Jarno ; Ma, Kechun et al.
41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: University of Twente, 2015.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

AU - Alveringh, Dennis

AU - Groenesteijn, Jarno

AU - Ma, Kechun

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 41

PY - 2015/9/21

Y1 - 2015/9/21

N2 - We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.

AB - We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.

KW - Capacitive readout

KW - Flow sensor

KW - Coriolis

KW - MEMS

KW - Actuation signal cancellation

KW - TST-FLUID HANDLING

U2 - 10.13140/RG.2.1.4314.5686

DO - 10.13140/RG.2.1.4314.5686

M3 - Conference contribution

BT - 41st International Conference on Micro- and Nano-Engineering, MNE 2015

PB - University of Twente

CY - Enschede

T2 - 41st International Conference on Micro- and Nano-Engineering, MNE 2015

Y2 - 21 September 2015 through 24 September 2015

ER -

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

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Keywords

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