A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

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    Abstract

    We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.
    Original languageEnglish
    Title of host publication41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Place of PublicationThe Hague
    PublisherMNE 2015
    Pages-
    Number of pages1
    ISBN (Print)not assigned
    DOIs
    Publication statusPublished - 21 Sep 2015
    Event41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands
    Duration: 21 Sep 201524 Sep 2015
    Conference number: 41

    Conference

    Conference41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Abbreviated titleMNE
    CountryNetherlands
    CityThe Hague
    Period21/09/1524/09/15

    Keywords

    • METIS-314964
    • IR-98236
    • Capacitive readout
    • Flow sensor
    • Coriolis
    • MEMS
    • actuation signal cancellation
    • EWI-26288
    • TST-FLUID HANDLING

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  • Cite this

    Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2015). A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015 (pp. -). The Hague: MNE 2015. https://doi.org/10.13140/RG.2.1.4314.5686