A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

Dennis Alveringh, Jarno Groenesteijn, Kechun Ma, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.
Original languageEnglish
Title of host publication41st International Conference on Micro- and Nano-Engineering, MNE 2015
Place of PublicationThe Hague
PublisherMNE 2015
Pages-
Number of pages1
ISBN (Print)not assigned
DOIs
Publication statusPublished - 21 Sep 2015
Event41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands
Duration: 21 Sep 201524 Sep 2015
Conference number: 41

Conference

Conference41st International Conference on Micro- and Nano-Engineering, MNE 2015
Abbreviated titleMNE
CountryNetherlands
CityThe Hague
Period21/09/1524/09/15

Fingerprint

mass flow
tuning
actuation
sensitivity
sensors
phase shift
cancellation

Keywords

  • METIS-314964
  • IR-98236
  • Capacitive readout
  • Flow sensor
  • Coriolis
  • MEMS
  • actuation signal cancellation
  • EWI-26288
  • TST-FLUID HANDLING

Cite this

Alveringh, D., Groenesteijn, J., Ma, K., Wiegerink, R. J., & Lötters, J. C. (2015). A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015 (pp. -). The Hague: MNE 2015. https://doi.org/10.13140/RG.2.1.4314.5686
Alveringh, Dennis ; Groenesteijn, Jarno ; Ma, Kechun ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague : MNE 2015, 2015. pp. -
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title = "A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning",
abstract = "We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.",
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Alveringh, D, Groenesteijn, J, Ma, K, Wiegerink, RJ & Lötters, JC 2015, A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. in 41st International Conference on Micro- and Nano-Engineering, MNE 2015. MNE 2015, The Hague, pp. -, 41st International Conference on Micro- and Nano-Engineering, MNE 2015, The Hague, Netherlands, 21/09/15. https://doi.org/10.13140/RG.2.1.4314.5686

A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. / Alveringh, Dennis; Groenesteijn, Jarno; Ma, Kechun; Wiegerink, Remco J.; Lötters, Joost Conrad.

41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague : MNE 2015, 2015. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning

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AB - We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the same mass flows. The range and sensitivity of the sensor can be tuned by changing the amount of cancellation of the actuation frequency, e.g. the size ratio between the comb-pairs.

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Alveringh D, Groenesteijn J, Ma K, Wiegerink RJ, Lötters JC. A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015. The Hague: MNE 2015. 2015. p. - https://doi.org/10.13140/RG.2.1.4314.5686