A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges

H.A.C. Tilmans, S. Bouwstra

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 7 Sep 1993
Event	4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel Duration: 7 Sep 1993 → 8 Sep 1993 Conference number: 4

Conference	4th MicroMechanics Europe Workshop, MME 1993
Abbreviated title	MME
City	Neuchatel
Period	7/09/93 → 8/09/93

Keywords

@conference{f0aab905cc7540afb5427b99dd4b628f,

title = "A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges",

keywords = "METIS-117992",

author = "H.A.C. Tilmans and S. Bouwstra",

year = "1993",

month = sep,

day = "7",

language = "Undefined",

pages = "--",

note = "null ; Conference date: 07-09-1993 Through 08-09-1993",

}