A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges

H.A.C. Tilmans, S. Bouwstra

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 7 Sep 1993
    Event4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel
    Duration: 7 Sep 19938 Sep 1993
    Conference number: 4

    Conference

    Conference4th MicroMechanics Europe Workshop, MME 1993
    Abbreviated titleMME
    CityNeuchatel
    Period7/09/938/09/93

    Keywords

    • METIS-117992

    Cite this

    Tilmans, H. A. C., & Bouwstra, S. (1993). A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges. -. Poster session presented at 4th MicroMechanics Europe Workshop, MME 1993, Neuchatel, .