Original language | Undefined |
---|---|
Title of host publication | 4th Workshop on micromachining, Micromechanics and Microsystems (MME '93) |
Place of Publication | Neuchatel, Zwitserland |
Pages | 138-142 |
Publication status | Published - 7 Sep 1993 |
Keywords
- METIS-114143
H.A.C. Tilmans, S. Bouwstra
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | 4th Workshop on micromachining, Micromechanics and Microsystems (MME '93) |
Place of Publication | Neuchatel, Zwitserland |
Pages | 138-142 |
Publication status | Published - 7 Sep 1993 |