A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges

H.A.C. Tilmans, S. Bouwstra

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    5 Citations (Scopus)
    Original languageUndefined
    Title of host publication4th Workshop on micromachining, Micromechanics and Microsystems (MME '93)
    Place of PublicationNeuchatel, Zwitserland
    Pages138-142
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-114143

    Cite this

    Tilmans, H. A. C., & Bouwstra, S. (1993). A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges. In 4th Workshop on micromachining, Micromechanics and Microsystems (MME '93) (pp. 138-142). Neuchatel, Zwitserland.