A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	4th Workshop on micromachining, Micromechanics and Microsystems (MME '93)
Place of Publication	Neuchatel, Zwitserland
Pages	138-142
Publication status	Published - 7 Sept 1993

Keywords

@inproceedings{fe69547475284f379e11eea50edfc2de,

title = "A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges",

keywords = "METIS-114143",

author = "H.A.C. Tilmans and S. Bouwstra",

year = "1993",

month = sep,

day = "7",

language = "Undefined",

pages = "138--142",

booktitle = "4th Workshop on micromachining, Micromechanics and Microsystems (MME '93)",

}

A novel design of a highly sensitive low differential pressure sensor using built-in resonant strain gauges. / Tilmans, H.A.C.; Bouwstra, S.
4th Workshop on micromachining, Micromechanics and Microsystems (MME '93). Neuchatel, Zwitserland, 1993. p. 138-142.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review