A novel electrostatically actuated AFM probe for vibro-flexural mode operation

Edin Sarajlic; Martin Herman Siekman; H. Fujita; Leon Abelmann; Niels Roelof Tas

doi:10.1109/MEMSYS.2011.5734480

A novel electrostatically actuated AFM probe for vibro-flexural mode operation

Edin Sarajlic, Martin Herman Siekman, H. Fujita, Leon Abelmann, Niels Roelof Tas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

2 Citations (Scopus)

172 Downloads (Pure)

Abstract

A successful approach to drastically reduce or even completely eliminate friction and wear in scanning force microscopy is the use of electrostatic modulation of the normal force acting on the tip-sample contact. In this paper we have devised, fabricated and experimentally characterized a novel electrostatically actuated AFM probe. The probe consists of a flexible cantilever that has an electrostatic circular plate actuator with a built-in sharp tip monolithically integrated at its free end. This unique probe configuration will allow for the vibro-flexural mode operation in which vibration of the tip relative to the cantilever is generated and controlled by the integrated plate actuator, while the tip-sample interaction is resolved by deflection of the cantilever. We envision that this new operation mode will result in an efficient electrostatic force modulation, which in the end will enable us to control friction and wear during AFM imaging.

Original language	Undefined
Title of host publication	Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place of Publication	USA
Publisher	IEEE
Pages	537-540
Number of pages	4
ISBN (Print)	978-1-4244-9633-4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734480
Publication status	Published - Jan 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24

Publication series

Name
Publisher	IEEE

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated title	MEMS
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

Keywords

METIS-277452
IR-76069
TST-SMI: Formerly in EWI-SMI
TST-uSPAM: micro Scanning Probe Array Memory
EWI-18864

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2011.5734480

Cite this

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title = "A novel electrostatically actuated AFM probe for vibro-flexural mode operation",

abstract = "A successful approach to drastically reduce or even completely eliminate friction and wear in scanning force microscopy is the use of electrostatic modulation of the normal force acting on the tip-sample contact. In this paper we have devised, fabricated and experimentally characterized a novel electrostatically actuated AFM probe. The probe consists of a flexible cantilever that has an electrostatic circular plate actuator with a built-in sharp tip monolithically integrated at its free end. This unique probe configuration will allow for the vibro-flexural mode operation in which vibration of the tip relative to the cantilever is generated and controlled by the integrated plate actuator, while the tip-sample interaction is resolved by deflection of the cantilever. We envision that this new operation mode will result in an efficient electrostatic force modulation, which in the end will enable us to control friction and wear during AFM imaging.",

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year = "2011",

month = jan,

doi = "10.1109/MEMSYS.2011.5734480",

language = "Undefined",

isbn = "978-1-4244-9633-4",

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booktitle = "Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011",

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Sarajlic, E, Siekman, MH, Fujita, H, Abelmann, L & Tas, NR 2011, A novel electrostatically actuated AFM probe for vibro-flexural mode operation. in Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE, USA, pp. 537-540, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734480

A novel electrostatically actuated AFM probe for vibro-flexural mode operation. / Sarajlic, Edin; Siekman, Martin Herman; Fujita, H. et al.
Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE, 2011. p. 537-540.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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