A Mach-Zehnder interferometer with an electrooptic polymer microring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.
- Integrated Optics
- Electro-optic modulation
- Optical polymers
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY