A Novel high-speed polymeric EO modulator based on a combination of a microring resonator and an MZI

Arne Leinse, Mart Diemeer, A. Rousseau, A. Driessen

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    29 Citations (Scopus)
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    Abstract

    A Mach-Zehnder interferometer with an electrooptic polymer microring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.
    Original languageUndefined
    Pages (from-to)2074-2076
    Number of pages3
    JournalIEEE photonics technology letters
    Volume17
    Issue number10
    DOIs
    Publication statusPublished - Oct 2005

    Keywords

    • METIS-227896
    • EWI-12335
    • Integrated Optics
    • Microresonators
    • Electro-optic modulation
    • IR-54171
    • Optical polymers
    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY

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