Abstract
A Mach-Zehnder interferometer with an electrooptic polymer microring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.
| Original language | Undefined |
|---|---|
| Pages (from-to) | 2074-2076 |
| Number of pages | 3 |
| Journal | IEEE photonics technology letters |
| Volume | 17 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Oct 2005 |
Keywords
- METIS-227896
- EWI-12335
- Integrated Optics
- Microresonators
- Electro-optic modulation
- IR-54171
- Optical polymers
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY