A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

P.V.S. Pham Van So; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; Markus Pollnau; Gijsbertus J.M. Krijnen; Hugo Hoekstra

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.

Original language	Undefined
Title of host publication	Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter
Place of Publication	Ghent, Belgium
Publisher	Department of Information Technology, Ghent University
Pages	61-64
Number of pages	4
ISBN (Print)	978-90-76546-00-1
Publication status	Published - 1 Dec 2011
Event	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 - Ghent, Belgium Duration: 1 Dec 2011 → 2 Dec 2011 Conference number: 16 http://www.photonics-benelux.org/symp11/

Publication series

Name
Publisher	Department of Information Technology, Ghent University

Conference

Conference	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011
Country/Territory	Belgium
City	Ghent
Period	1/12/11 → 2/12/11
Internet address	http://www.photonics-benelux.org/symp11/

Keywords

METIS-285234
EWI-21291
IR-79370

Access to Document

IEEE_Benelux_2011_Pham

Cite this

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title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",

abstract = "Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.",

keywords = "METIS-285234, EWI-21291, IR-79370",

author = "{Pham Van So}, P.V.S. and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and Markus Pollnau and Krijnen, {Gijsbertus J.M.} and Hugo Hoekstra",

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year = "2011",

month = dec,

day = "1",

language = "Undefined",

isbn = "978-90-76546-00-1",

publisher = "Department of Information Technology, Ghent University",

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booktitle = "Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter",

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Pham Van So, PVS, Dijkstra, M, van Wolferen, HAGM, Pollnau, M, Krijnen, GJM & Hoekstra, H 2011, A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. in Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Department of Information Technology, Ghent University, Ghent, Belgium, pp. 61-64, 16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011, Ghent, Belgium, 1/12/11.

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. / Pham Van So, P.V.S.; Dijkstra, Mindert; van Wolferen, Hendricus A.G.M. et al.

Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Ghent, Belgium : Department of Information Technology, Ghent University, 2011. p. 61-64.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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AU - Pham Van So, P.V.S.

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - Pollnau, Markus

AU - Krijnen, Gijsbertus J.M.

AU - Hoekstra, Hugo

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