A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

S.V. Pham; M. Dijkstra; H.A.G.M. van Wolferen; M. Pollnau; G.J.M. Krijnen; H.J.W.M. Hoekstra

A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide

S.V. Pham, M. Dijkstra, H.A.G.M. van Wolferen, M. Pollnau, G.J.M. Krijnen, H.J.W.M. Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.

Original language	English
Title of host publication	Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter
Place of Publication	Ghent, Belgium
Publisher	Ghent University
Pages	61-64
Number of pages	4
ISBN (Print)	978-90-76546-00-1
Publication status	Published - 1 Dec 2011
Event	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 - Ghent, Belgium Duration: 1 Dec 2011 → 2 Dec 2011 Conference number: 16 http://www.photonics-benelux.org/symp11/

Conference

Conference	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011
Country/Territory	Belgium
City	Ghent
Period	1/12/11 → 2/12/11
Internet address	http://www.photonics-benelux.org/symp11/

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A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide
Pham, S. V., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M. & Hoekstra, H. J. W. M., 2011, 2011 Conference on Lasers and Electro-Optics: Laser Science to Photonic Applications, CLEO 2011. IEEE, 5950509. (CLEO - Laser Science to Photonic Applications; vol. 2011).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
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A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide
Pham, S. V., Dijkstra, M., van Wolferen, H. A. G. M., Pollnau, M., Krijnen, G. J. M. & Hoekstra, H. J. W. M., May 2011, Conference on Lasers and Electro-Optics, CLEO. Washington, DC: Optical Society of America, p. CThQ4 2 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
File

Cite this

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title = "A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide",

abstract = "Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.",

author = "S.V. Pham and M. Dijkstra and {van Wolferen}, H.A.G.M. and M. Pollnau and G.J.M. Krijnen and H.J.W.M. Hoekstra",

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booktitle = "Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter",

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Pham, SV, Dijkstra, M, van Wolferen, HAGM, Pollnau, M, Krijnen, GJM & Hoekstra, HJWM 2011, A novel mechano-optical sensor based on read-out with a Si₃N₄ grated waveguide. in Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Ghent University, Ghent, Belgium, pp. 61-64, 16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011, Ghent, Belgium, 1/12/11.

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T1 - A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

AU - Pham, S.V.

AU - Dijkstra, M.

AU - van Wolferen, H.A.G.M.

AU - Pollnau, M.

AU - Krijnen, G.J.M.

AU - Hoekstra, H.J.W.M.

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N2 - Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.

AB - Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.

M3 - Conference contribution

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SP - 61

EP - 64

BT - Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter

PB - Ghent University

CY - Ghent, Belgium

T2 - 16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011

Y2 - 1 December 2011 through 2 December 2011

ER -

A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

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