A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

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    Abstract

    Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.
    Original languageUndefined
    Title of host publicationProceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter
    Place of PublicationGhent, Belgium
    PublisherDepartment of Information Technology, Ghent University
    Pages61-64
    Number of pages4
    ISBN (Print)978-90-76546-00-1
    Publication statusPublished - 1 Dec 2011
    Event16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 - Ghent, Belgium
    Duration: 1 Dec 20112 Dec 2011
    Conference number: 16
    http://www.photonics-benelux.org/symp11/

    Publication series

    Name
    PublisherDepartment of Information Technology, Ghent University

    Conference

    Conference16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011
    CountryBelgium
    CityGhent
    Period1/12/112/12/11
    Internet address

    Keywords

    • METIS-285234
    • EWI-21291
    • IR-79370

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